Convergence and interaction of BEOL and BE reliability methodology

IEEE International Reliability Physics Symposium Proceedings

Volumn 2004-January, Issue January, 2004, Pages 49-60

  Rzepka, Sven ^a   Lepper, Marco ^a   Böttcher, Mathias ^a   Bauer, Robert ^a   Weber, Stephan ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTRONIC PROCESSING; MICROELECTRONICS;

BACK END OF LINES; GENERATION TECHNOLOGIES; HIGH VOLUMES; MICROELECTRONIC FABRICATION; RELIABILITY METHODOLOGY; RELIABILITY STRATEGY;

RELIABILITY;

EID: 77955557555     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RELPHY.2004.1315301     Document Type: Conference Paper

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