Thermal effects of platinum bottom electrodes on PZT sputtered thin films used in MEMS devices

Key Engineering Materials

Volumn 437, Issue , 2010, Pages 598-602

  Koochekzadeh, Ali ^a,b   Alamdari, Eskandar Keshavarz ^a,b   Barzegar, Abod Al Ghafar ^c   Salardini, Ali A ^a  

^a MATERIALS AND ENERGY RESEARCH CENTER   (Iran)

^b AMIRKABIR UNIVERSITY OF TECHNOLOGY   (Iran)

^c SHIRAZ UNIVERSITY   (Iran)

Author keywords

Annealing treatment; Diffusion; MEMS; PZT

Indexed keywords

ANNEALING; DIFFUSION; ELECTRODES; LEAD TITANATE; MEMS; METALLIC FILMS; MORPHOLOGY; PEROVSKITE; PIEZOELECTRICITY; PLATINUM; RECRYSTALLIZATION (METALLURGY); SUBSTRATES; SURFACE MORPHOLOGY; SURFACE TESTING; TEMPERATURE DISTRIBUTION; THERMAL EVAPORATION; THIN FILM CIRCUITS; VACUUM EVAPORATION;

ANNEALING TEMPERATURES; ANNEALING TREATMENTS; PIEZOELECTRIC THIN FILMS; PLATINUM BOTTOM ELECTRODES; POST ANNEALING TREATMENT; PREFERRED ORIENTATIONS; R.F. MAGNETRON SPUTTERING; TEMPERATURE DEPENDENCE;

THIN FILMS;

EID: 77955532116     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/KEM.437.598     Document Type: Conference Paper

References (5)

1. T. Haccart, E. Cattan, D. Remiens: Dielectric, ferroelectric and piezoelectric properties of sputtered PZT thin films on Si substrates: influence of film thickness and orientation. Semicond. Phys., Quant Electron. Optoelect. Vol. 5 (2002), pp. 78-88.
2. C. Millon, C. Malhaire, D. Barbier: Ti and TiOx seeding influence on the orientation and ferroelectric properties of sputtered PZT thin films. Sens. Actu. Vol. 113 (2004), pp. 376-381.
3. Y. Jeong, H. Lee, S. Lee, J. Kim, H. Kim, S. Jeong, C. Cho: Annealing effect of platinum based electrodes on physical properties of PZT thin films. Submitted to Curr. Appl. Phys. (2008).
4. C.C. Chang, K.H. Chen: Characterization of lead zirconate titanate thin film deposition onto Pt/Ti/SiO2/Si substrates. J. Mat. Sci. Mat. Electr. Vol. 10 (1999), pp. 551-556.
5. A. Sivapurapu: Piezoelectrically-transduced silicon micromechanical resonators. Georgia Institute of Technology (December 2005).