Submicron functional surfaces generated by diamond machining

CIRP Annals - Manufacturing Technology

Volumn 59, Issue 1, 2010, Pages 535-538

  Brinksmeier, E ^a   Riemer, O ^a   Glabe R ^a   Lunemann B ^a   Kopylow, C V ^b   Dankwart, C ^b   Meier, A ^a  

^a UNIVERSITY OF BREMEN   (Germany)

^b BIAS BREMER INSTITUT FÜR ANGEWANDTE STRAHLTECHNIK GMBH   (Germany)

Author keywords

Nano Fast Tool Servo; Nano manufacturing; Ultra precision

Indexed keywords

DATA PREPROCESSING; DIAMOND MACHINING; DIAMOND TURNING; FAST TOOL SERVO; FUNCTIONAL SURFACES; MACHINING ACCURACY; NANO-MANUFACTURING; NANOMETER PRECISION; OPTICAL SURFACES; PIEZO ACTUATOR; SUBMICRON; ULTRA PRECISION; WORKPIECE MATERIALS;

DATA PROCESSING; DENSITY (OPTICAL); DIFFRACTIVE OPTICAL ELEMENTS; TURNING;

SERVOMOTORS;

EID: 77955314344     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2010.03.037     Document Type: Article

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