Diamond machining of diffractive optical patterns by using a nanometer-stroke fast tool servo

Laser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007

Volumn , Issue , 2007, Pages 232-241

  Brinksmeier, E ^a   Glabe R ^a   Lunemann B ^a  

^a UNIVERSITY OF BREMEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; MACHINE TOOLS; SUBSTRATES;

COST EFFECTIVE; DIAMOND MACHINING; DIAMOND TURNING; DIFFRACTIVE PATTERNS; DIRECT MANUFACTURE; FAST TOOL SERVO; OPTICAL PATTERNS; SINGLE-STEP PROCESS;

TURNING;

EID: 77955327373     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. Özmeral, H.: Elektromagnetisches Fast Tool Servo für den Einsatz in der Ultrapräzisionstechnik. Ph.D.-thesis, IPT, RWTH Aachen, 2000.
2. Lu, X.: Electromagnetically-Driven Fast Tool Servos For Diamond Turning. Ph.D.-thesis, MIT, Cambridge, USA, 2005.
3. Herzig, H.P.: Micro-Optics - Elements, systems and applications, Institute of Microtechnology, Switzerland, Tylor & Francis, 1997.