Iridium coatings with titanium sub-layer deposited by RF magnetron sputtering: Mechanical properties and contact behavior with RoHS-compliant glass melt

Plasma Processes and Polymers

Volumn 6, Issue SUPPL. 1, 2009, Pages

  Hagen, J Jan ^a   Burmeister, Frank ^a   Fromm, Alexander ^a   Manns, Peter ^a   Kleer, Günter ^a  

^a FRAUNHOFER INSTITUTE FOR MECHANICS OF MATERIALS IWM   (Germany)

Author keywords

Corrosion; Hardness; Metal containing coatings; Physical vapor deposition (pvd); Scratch test

Indexed keywords

COATING ADHESION; CONTACT BEHAVIOR; CYCLIC CONTACTS; GLASS MELTS; GLASS MOLDING; HOT MELT; IRIDIUM COATINGS; NANOINDENTATION TESTS; RF-MAGNETRON SPUTTERING; SCRATCH TEST; THERMO-MECHANICAL DURABILITY; YOUNG'S MODULUS;

CORROSION; GLASS; GLASS MANUFACTURE; HARDNESS; HAZARDOUS MATERIALS; IRIDIUM; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; NANOINDENTATION; PHYSICAL VAPOR DEPOSITION; SMELTING; TITANIUM; TUNGSTEN; TUNGSTEN CARBIDE;

COATINGS;

EID: 77954913408     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200931701     Document Type: Conference Paper

References (14)

1. D. Rieser, G. Spieß, P. Manns, J. of Non-Crystall. Sol. 2008, 354, 1393-1397.
2. G. Kleer, W. Doli, Mat-wiss. u. Werkstofftech. 1993, 24, 80.
3. Directive 2002/95/EC of the European Parliament and of the Council of 27 January 2003, see e.g. http://europa.eu/scadplus/leg/en/lvb/121210.htm.
4. L. Chang, Y. Chen, J. Lee, H. Lin, Y. Kuo, C. Wang, Surf. Coat. Technol. 2007, 202, 967.
5. A. Hashibon, C. Elsässer, private communication.
6. DE 19714365 (1998), W.C. Heraeus GmbH, invs.; B. Fischer, K. H. Goy, W. Kock, D. Francis, H. Manhardt, J. Merker, F. Scholz, B. Zurowski.
7. F. Wu, W. Chen, J. Duh, Y. Tsai, Y. Chen, Surf. Coat. Technol. 2003, 163-164, 227.
8. P. Kuppusami, H. Murakami, T. Ohmura, J. Vac. Sci. Technol. A 2004, 22, 1208.
9. J. Echigoya, K. Mumtaz, Y. Hayasaka, E. Aoyagi, J. Mat. Sci. 2004, 39, 6215.
10. L. Yan, J. A. Woollam, J. Appl. Phys. 2002, 92, 4386.
11. M. A. El Khakani, M. Chaker, B. Le Drogoff, J. Vac. Sci. Technol. A 1998, 16, 885.
12. International standard DIN EN ISO 14577-1, "Metallic materials - Instrumented indentation test for hardness and materials parameters - Part i: Test method", Eds., Beuth Verlag, Berlin 2002.
13. J. Musil, F. Kunc, H. Zeman, H. Polakova, Surf. Coat. Technol. 2002, 154, 304.
14. US 2007/0284255 (2007), invs.: V. Gorokhovsky, B. B. Heckerman.