Iridium thin films deposited by radio-frequency magnetron sputtering

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 885-888

  El Khakani, M A ^a   Chaker, M ^a   Le Drogoff, B ^a  

^a INRS EMT   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032379783     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581029     Document Type: Article

References (19)

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