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Volumn 8, Issue 2, 2010, Pages 253-257
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Mass loading effect of high aspect ratio structures grown over surface acoustic wave resonators
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Author keywords
FEM; High aspect ratio structures; Mass loading effect; SAW devices; Sensor simulation
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Indexed keywords
HIGH ASPECT RATIO;
HIGH ASPECT RATIO STRUCTURES;
HIGHLY SENSITIVE;
MASS LOADING EFFECTS;
MASS LOADINGS;
MESOSTRUCTURES;
RESONANCE FREQUENCIES;
SAW DEVICE;
SAW RESONATORS;
SAW SENSORS;
SENSOR SIMULATIONS;
SURFACE ACOUSTIC WAVE RESONATORS;
ACOUSTIC RESONATORS;
ACOUSTIC SURFACE WAVE DEVICES;
ACOUSTIC WAVES;
ACOUSTICS;
ACOUSTOELECTRIC EFFECTS;
LOADING;
NATURAL FREQUENCIES;
PHOTORESISTS;
PRESSURE DROP;
RESONATORS;
SENSORS;
STICTION;
SUPPORTS;
ASPECT RATIO;
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EID: 77954911086
PISSN: 1546198X
EISSN: None
Source Type: Journal
DOI: 10.1166/sl.2010.1258 Document Type: Article |
Times cited : (21)
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References (17)
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