Mass loading effect of high aspect ratio structures grown over surface acoustic wave resonators

Sensor Letters

Volumn 8, Issue 2, 2010, Pages 253-257

  Ramakrishnan, N ^a   Palathinkal, Roy Paily ^b   Nemade, Harshal B ^a,b  

^a Centre for Nanotechnology   (India)

^b INDIAN INSTITUTE OF TECHNOLOGY GUWAHATI   (India)

Author keywords

FEM; High aspect ratio structures; Mass loading effect; SAW devices; Sensor simulation

Indexed keywords

HIGH ASPECT RATIO; HIGH ASPECT RATIO STRUCTURES; HIGHLY SENSITIVE; MASS LOADING EFFECTS; MASS LOADINGS; MESOSTRUCTURES; RESONANCE FREQUENCIES; SAW DEVICE; SAW RESONATORS; SAW SENSORS; SENSOR SIMULATIONS; SURFACE ACOUSTIC WAVE RESONATORS;

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; LOADING; NATURAL FREQUENCIES; PHOTORESISTS; PRESSURE DROP; RESONATORS; SENSORS; STICTION; SUPPORTS;

ASPECT RATIO;

EID: 77954911086     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2010.1258     Document Type: Article

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