Numerical study of the effects of film properties to the mass sensitivity of surface acoustic wave sensors

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn 2005, Issue , 2005, Pages 442-448

  Wang, Xin ^a   Xu, Guanshui ^a  

^a University of California Riverside   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; COMPUTATIONAL METHODS; FILM GROWTH; MATHEMATICAL MODELS; SENSITIVITY ANALYSIS; SURFACE WAVES;

ELECTROMECHANICAL WAVE PROPAGATION; FILM PROPERTIES; FILM THICKNESS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 33846619300     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2005.1573971     Document Type: Conference Paper

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