Evolution of black silicon nano- and micro-scale surface topologies upon femtosecond laser irradiation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7719, Issue , 2010, Pages

  Kudryashov, S I ^a   Golosov, E V ^b   Ionin, A A ^a   Kolobov, Yu R ^b   Ligachev, A E ^c   Makarov, S V ^a   Novoselov, Yu N ^a   Seleznev, L V ^a   Sinitsyn, D V ^a  

^a LEBEDEV PHYSICAL INSTITUTE   (Russian Federation)

^b BELGOROD STATE UNIVERSITY   (Russian Federation)

^c PROKHOROV GENERAL PHYSICS INSTITUTE   (Russian Federation)

Author keywords

"black" silicon; femtosecond laser pulses; surface nano and microstructuring

Indexed keywords

BLACK SILICON; FEMTOSECOND LASER IRRADIATION; FEMTOSECOND LASER PULSE; FEMTOSECOND LASER PULSES; INCIDENT LASER; LASER FLUENCES; MICRO STRUCTURING; MICRO-SCALES; NANO-GRATINGS; SILICON SURFACES; SURFACE TOPOLOGY; TOPOLOGICAL TRANSFORMATION; VARIABLE NUMBER;

INTEGRATED CIRCUITS; IRRADIATION; PHOTONIC DEVICES; TOPOLOGY; TWO DIMENSIONAL; ULTRASHORT PULSES;

PULSED LASER APPLICATIONS;

EID: 77954719695     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.854511     Document Type: Conference Paper

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