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Volumn 7729, Issue , 2010, Pages

Measuring the beam size of a focused ion beam (FIB) system

Author keywords

[No Author keywords available]

Indexed keywords

BEAM POSITIONS; BEAM SIZE; DISTANCE EXPERIMENT; DISTANCE METHOD; FOCUSED-ION-BEAM SYSTEM; IMAGING RESOLUTIONS; SCANNING ELECTRON MICROSCOPE; SECONDARY ELECTRON YIELD; STATISTICAL EFFECTS;

EID: 77954518217     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.853027     Document Type: Conference Paper
Times cited : (10)

References (3)
  • 1
    • 0005234683 scopus 로고    scopus 로고
    • Fundamental Limits on Imaging Resolution in Focused ion Beam Systems
    • J. Orloff, L.W. Swanson and M. Utlaut, "Fundamental Limits on Imaging Resolution in Focused ion Beam Systems", J. Vac. Sci. Tech. B14 (1996) p 3759
    • (1996) J. Vac. Sci. Tech. , vol.B14 , pp. 3759
    • Orloff, J.1    Swanson, L.W.2    Utlaut, M.3
  • 3
    • 0029697463 scopus 로고    scopus 로고
    • Addition of different contributions to the charged particle probe size
    • J.E. Barth and P. Kruit, "Addition of different contributions to the charged particle probe size," Optik 101 (1996) p 101
    • (1996) Optik , vol.101 , pp. 101
    • Barth, J.E.1    Kruit, P.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.