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Volumn 7729, Issue , 2010, Pages
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Measuring the beam size of a focused ion beam (FIB) system
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Author keywords
[No Author keywords available]
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Indexed keywords
BEAM POSITIONS;
BEAM SIZE;
DISTANCE EXPERIMENT;
DISTANCE METHOD;
FOCUSED-ION-BEAM SYSTEM;
IMAGING RESOLUTIONS;
SCANNING ELECTRON MICROSCOPE;
SECONDARY ELECTRON YIELD;
STATISTICAL EFFECTS;
EXPERIMENTS;
FOCUSED ION BEAMS;
IONS;
SCANNING;
SCANNING ELECTRON MICROSCOPY;
MEASUREMENT ERRORS;
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EID: 77954518217
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.853027 Document Type: Conference Paper |
Times cited : (10)
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References (3)
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