A new finite element approach for studying the effect of surface stress on microstructures

Sensors and Actuators, A: Physical

Volumn 159, Issue 2, 2010, Pages 141-148

  Ricci, A ^a   Ricciardi, C ^a  

^a POLITECNICO DI TORINO   (Italy)

Author keywords

Cantilever FEM surface stress MEMS

Indexed keywords

MECHANICS; MEMS; NANOSTRUCTURES; SURFACE PROPERTIES;

DYNAMIC ASPECTS; FINITE-ELEMENT APPROACH; MICRO ELECTRO MECHANICAL SYSTEM; MICRO-CANTILEVERS; NANO SCALE; PRINCIPLE OF VIRTUAL WORK; SURFACE DEFORMATION; SURFACE STRESS;

FINITE ELEMENT METHOD;

EID: 77954313986     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.03.008     Document Type: Article

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