X-ray fabrication of SAW resonators with narrow electrodes in thick high-aspect-ratio polymer templates

Journal of Micromechanics and Microengineering

Volumn 20, Issue 7, 2010, Pages

  Klymyshyn, David M ^a,b   Mappes, Timo ^c   Achenbach, Sven ^a,b   Kachayev, Anton ^d   Börner, Martin ^e   Mohr, Jürgen ^e  

^a UNIVERSITY OF SASKATCHEWAN   (Canada)

^b TRLabs   (Canada)

^c UNIVERSITY OF KARLSRUHE   (Germany)

^d VECIMA NETWORKS INC   (Canada)

^e KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC APPLICATION; ALUMINUM DEPOSITION; ENVIRONMENTAL SCANNING ELECTRON MICROSCOPY; ETCH MASK; HIGH ASPECT RATIO; HIGH ASPECT RATIO STRUCTURES; INTERDIGITAL ELECTRODE; METAL DEPOSITION; METAL ELECTRODES; METAL REMOVAL; POLYMER TEMPLATES; SAW RESONATORS; SUBMICRON SCALE; SURFACE ACOUSTIC WAVES; SURFACE TOPOLOGY; X RAY MASK;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ALUMINUM COATINGS; ATOMIC FORCE MICROSCOPY; ELECTRODES; MASKS; METALS; POLYMERS; RESONATORS; SCANNING ELECTRON MICROSCOPY; SERPENTINE; SILICATE MINERALS; SILICON NITRIDE; X RAYS;

ASPECT RATIO;

EID: 77953899514     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/7/075031     Document Type: Article

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