Propagation characteristics of longitudinal leaky SAW in Al-grating structure

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 46, Issue 4, 1999, Pages 849-855

  Isobe, Atsushi ^a   Hikita, Milsutaka ^a   Asai, Kengo ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC IMPEDANCE MEASUREMENT; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVE PROPAGATION; ACOUSTIC WAVE VELOCITY; ALUMINUM; COMPUTER SIMULATION; FINITE ELEMENT METHOD; LITHIUM NIOBATE; MATRIX ALGEBRA; NATURAL FREQUENCIES; SUBSTRATES;

ALUMINUM GRATING STRUCTURE; LITHIUM TANTALATE; PROPAGATION LOSSES; SURFACE ACOUSTIC WAVE RESONATOR;

ACOUSTIC RESONATORS;

EID: 0032635330     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.775649     Document Type: Article

References (18)

1. M. Hikita.A. Isobe, A. Sumîoka, N. Matsuura, and K. Okazaki, "Rigorous treatment of leaky SAWs and new equivalent circuit representation for interdigital transducers," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 43, no. 3, pp. 482-490, May 1996.
2. N.F. Naumenko, ''Leaky surface acoustic waves with quasilongitudinal polarization in the crystal of lithium tetraborate," Sov. Phys.-Crystallography, vol. 37, no. 2, pp. 520-522, Mar.Apr. 1992.
3. T. Sato and H. Abe, "Propagation properties of longitudinal leaky surface wave on lithium tetraborate," Pror.. IEEE Ultrason. Symp., 1994, pp. 284-292.
4. S. Tonami, A. Nishikata, and Y. Shimizu, "Characteristics of leaky surface acoustic waves propagating on LiNbOs and LiTaOs substrates," Jpn.J. Appl. Pliys., vol. 34, no. 5B, pp. 2064-2667, May 1995.
5. M.P. da Cunha. "High velocity pseudo surface waves (HYPSAW): further insight." Proc. IEEE Ultrason. Symp.. 1996, pp. 97 106.
6. Y. Kobayashi.N. Tanaka. K. Matsui. H. Okano. T. Usui, and K. Shibata. "1.9-GHz-band surface acoustic wave device using second leaky mode on LiTaOs," Jpn. J. Appi. Phys., vol. 35. no. 5B, pp. 2987-2990, May 1996.
7. V.P. Plessky and T. Thorvaldsson, "Periodic Green's function analysis of SAW and leaky SAW propagation in a periodic system of electrodes on a piezoelectric crystal," IEEE Trims. Ultrason., Ferroelect, Frcg. Contr., vol. 42, no. 2, pp. 280-293. Mar. 1995.
8. P.C. Peach, "A general Green function analysis for SAW devices," Proc.. IEEE Ultrason. Symp., 1995, pp. 221-225.
9. P. Ventura, J.M. Hode, and M. Solal, ':A new efficient combined FEM and periodic Green's function formalism for the analysis of periodic SAW structures." Proc. IEEE Ultrason. Symp.. 1995, pp. 263-268.
10. K. Hashimoto and M. Yamaguchi. "Precise simulation of surface transverse wave devices by discrete Green function theory," Proc. IEEE Ultrason. Symp., 1994, pp. 253-258.
11. [llj K. Yamanouchi and K. Shibayama. "Propagation and amplification of Rayleigh waves and piezoelectric leaky surface waves in LiNbOs." J. Appl. Phys., vol. 43, no. 3, pp. 856 862, Mar. 1972.
12. [12 M. Koshiba, S. Mitobe, and M. Suzuki. "Finite-element solution of periodic waveguides for acoustic waves," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. UFFC-34, no. 4, pp. 472-477, Jul. 1987.
13. [13 A. Isobe, M. Hikita, and K. Asai, "Simulator for SAW-resonator using the combined finite-element and analytical method." 15th Symp. Ultrason. Elect., 1994, pp. 275-276 (in Kyoto).
14. [14' P. Silverster and H.S. Hsieh, "Finite-element solutions of 2dimensional exterior-field problems," Proc. IEE, vol. 118, no. 12. pp. 1743-1747, Dec. 1971.
15. J.G. Brainerd. "Standard on piezoelectric crystals," Proc. 1REE Aust.. vol. 37. pp. 1378-1395, Dec. 1949.
16. Y. Shimizu.Y. Endo, and T. Watanabe, "A new cut of LiTaO3 with zero slope temperature by a leaky surface wave," Proc. IEEE Ultrason. Symp., 1987, pp. 253-256.
17. A. Isobe.M. Hikita, and K. Asai, "Propagation properties of Love wave-type surface-acoustic wave on a-quartz," Elect. Commun. Jpn.. vol. 79. no. 2, pp. 24-30, Feb. 1996.
18. [18j K. Nakamura, M. Kazumi, and II. Shimizu, "SH-type and Rayleigh-type surface waves on rotated Y-cut LiTaOa." Proc. IEEE Ultrason. Symp., 1977, pp. 819-822.