Lithium niobate ridge waveguides fabricated by ion implantation followed by ion beam etching

Journal of Lightwave Technology

Volumn 28, Issue 13, 2010, Pages 1913-1916

  Zhao, Jin Hua ^a   Liu, Xiu Hong ^a   Huang, Qing ^a   Liu, Peng ^a   Wang, Xue Lin ^a  

^a SHANDONG UNIVERSITY   (China)

Author keywords

Ion radiation effects; Optical device fabrication; Optical materials; Waveguides components

Indexed keywords

FABRICATION METHOD; ION BEAM ETCHING; ION RADIATION EFFECTS; LITHIUM NIOBATE; OPTICAL DEVICE FABRICATION; REFRACTIVE INDEX PROFILES; RIDGE WAVEGUIDES; SIMULATION RESULT; SMOOTH SURFACE; WAVEGUIDES COMPONENT;

BEAM PROPAGATION METHOD; ELECTROMAGNETIC WAVE PROPAGATION; ETCHING; FABRICATION; ION BEAMS; ION IMPLANTATION; LITHIUM; NIOBIUM COMPOUNDS; OPTICAL DEVICES; OPTICAL INSTRUMENTS; OPTICAL MATERIALS; RADIATION EFFECTS; REFRACTIVE INDEX; SEMICONDUCTING INDIUM GALLIUM ARSENIDE;

WAVEGUIDES;

EID: 77953827119     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2010.2050296     Document Type: Article

References (23)

1. H. Jelíková, J. Šulc, P. Koranda, N. Mêmec, M. Čech, M. Jelíek, and V. Škoda, "LiNbO pockels cell for Q-switch of Er:YAG laser," Laser Phys. Lett., vol.1, no.2, pp. 59-64, 2004.
2. T. J. Wang, Q. Y. He, J. Y. Gao, Z. H. Kang, Y. Jiang, and H. Sun, "Comparison of electrooptically Q-switched Er:Cr:YSGG lasers by two polarizers: Glan-Taylor prism and Brewster angle structure," Laser Phys. Lett., vol.3, no.7, pp. 349-352, 2006.
3. H. Jelíková, M. Fibrich, M. Čech, P. HirŠl, K. Nejezchleb, and V. Škoda, "Electro-optically Q-switched Pr:YAP laser generating at 747 nm," Laser Phys. Lett., vol.6, no.7, pp. 517-520, 2009.
4. R. S. Weis and T. K. Gaylord, "Lithium niobate: Summary of physical properties and crystal structure," Appl. Phys. A, vol.37, no.4, pp. 191-203, 1985.
5. M. Iwai, T. Yoshino, S. Yamaguchi, M. Imaeda, N. Pavel, I. Shoji, and T. Taira, "High-power blue generation from a periodically poled MgO:LiNbO ridge-type waveguide by frequency doubling of a diode end-pumped Nd:Y Al O laser," Appl. Phys. Lett., vol.83, pp. 3659-3661, 2003.
6. P. Rabiei and W. H. Steier, "Lithium niobate ridge waveguides and modulators fabricated using smart guide," Appl. Phys. Lett., vol.86, pp. 161115-1-161115-3, 2005.
7. J. G. Scott, A. J. Boyland, S. Mailis, C. Grivas, O.Wagner, S. Lagoutte, and R. W. Eason, "Self-ordered sub-micron structures in Fe-doped LiNbO formed by light-induced frustration of etching," Appl. Surf. Sci., vol.230, no.1-4, pp. 138-150, 2004.
8. N. Mitsugi, H. Nagata, K. Shima, and M. Tamai, "Challenges in electron cyclotron resonance plasma etching of LiNbO surface for fabrication of ridge optical waveguides," J. Vac. Sci Technol., A, vol.16, no.4, pp. 2245-2251, 1998.
9. L.Wang, K. M.Wang, X. L.Wang, F. Chen, Y. Jiang, C. L. Jia, Y. Jiao, F. Lu, D. Y. Shen, H. J. Ma, and R. Nie, "Selective etching in LiNbO combined of MeV O and Si ion implantation with wet-etch technique," Surf. Coat. Technol., vol.201, no.9-11, pp. 5081-5084, Feb. 2007.
10. H. Hu, A. P. Milenin, R. B. Wehrspohn, H. Hermann, and W. Sohler, "Plasma etching of proton-exchanged lithium niobate," J. Vac. Sci Technol., A, vol.24, no.4, pp. 1012-1015, 2006.
11. K. Noguchi, O. Mitomi, H. Miyazawa, and S. Seki, "A broadband Ti : LiNbO optical modulator with a ridge structure," J. Lightw. Technol., vol.13, no.6, pp. 1164-1168, Jun. 1995.
12. T. Pliska, D. Fluck, P. Gunter, E. Gini, H. Melchior, L. Beckers, and C. Buchal, "Birefringence phase-matched blue light second-harmonic generation in a KNbO idge waveguide," Appl. Phys. Lett., vol.72, pp. 2364-2366, 1998.
13. H. Hu, R. Ricken, and W. Sohler, "Etching of lithium niobate: From ridge waveguide to photonic crystal structures," in Proc. 14th Eur. Conf. Integr. Optics (ECIO'08), Eindhoven, Netherlands, 2008, pp. 75-78.
14. F. Chen, X. L.Wang, and K. M.Wang, "Development of ion-implanted opticalwaveguides in optical materials:A review," Opt. Mater., vol.29, no.11, pp. 1523-1542, 2007.
15. X. L. Wang, K. M. Wang, F. Chen, G. Fu, S. L. Li, H. Liu, L. Gao, D. Y. Shen, H. J. Ma, and R. Nie, "Optical properties of stoichiometric LiNbO waveguides formed by low-dose oxygen ion implantation," Appl. Phys. Lett., vol.86, pp. 041103-1-041103-3, 2005.
16. J. M. White and P. F. Heidrich, "Optical waveguide refractive index profiles determined from measurement of mode indices: A simple analysis," Appl. Opt., vol.15, no.1, pp. 151-155, 1976.
17. P. J. Chandler and F. L. Lama, "A new approach to the determination of planar waveguide profiles by means of a non-stationary mode index calculation," Opt. Acta, vol.33, no.2, pp. 127-142, 1986.
18. P. D. Townsend, P. J. Chandler, and L. Zhang, Optical Effects of Ion Implantation. Cambridge, U.K.: Cambridge University Press, 1994.
19. H. Hu, F. Lu, F. Chen, B. R. Shi, K. M.Wang, and D. Y. Shen, "Extraordinary refractive-index increase in lithium niobate caused by low-dose ion implantation," Appl. Opt., vol.40, no.22, pp. 3759-3761, 2001.
20. S. M. Kostritskii and P. Moretti, "Specific behavior of refractive indexes in low-dose He -implanted LiNbO waveguides," J. Appl. Phys., vol.101, pp. 094109-1-094109-5, 2007.
21. Y. Jiang, K. M.Wang, X. L.Wang, F. Chen, C. L. Jia, L.Wang, and Y. Jiao, "Model of refractive-index changes in lithium niobatewaveguides fabricated by ion implantation," Phys. Rev. B, Condens. Matter, vol.75, pp. 195101-1-195101-6, 2007.
22. J. F. Ziegler, Computer Code SRIM (2006) [Online]. Available: http:// www.srim.org
23. R. Regener and W. Sohler, "Loss in low-finesse Ti:LiNbO3 optical waveguide resonators," Appl. Phys. B, vol.36, pp. 143-147, 1985.