Influence of torch power and Ar/C2H2 ratio on structure of amorphous carbon films

Lithuanian Journal of Physics

Volumn 49, Issue 1, 2009, Pages 97-103

  Marcinauskas, L ^a,b   Grigonis, A ^a   Valincius V ^b   Valatkevicius P ^b  

^a KAUNAS UNIVERSITY OF TECHNOLOGY   (Lithuania)

^b LITHUANIAN ENERGY INSTITUTE   (Lithuania)

Author keywords

Acetylene; Carbon films; Plasma torch; Structure

Indexed keywords

EID: 77952903893     PISSN: 16488504     EISSN: None     Source Type: Journal    
DOI: 10.3952/lithjphys.49107     Document Type: Conference Paper

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