Highly oriented Ta2O5 piezoelectric thin films prepared by RF-magnetron sputtering

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2009, Pages 2643-2646

  Kakio, Shoji ^a   Mitsui, Takeshi ^a   Tsuchiya, Akinori ^a   Nakagawa, Yasuhiko ^a  

^a UNIVERSITY OF YAMANASHI   (Japan)

Author keywords

Piezoelectric thin film; RF magnetron sputtering; X axis oriented tantalum pentoxide thin film

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; COUPLINGS; FILM THICKNESS; MAGNETRON SPUTTERING; PIEZOELECTRICITY; SILICA; TANTALUM OXIDES;

DC DIODE SPUTTERING; DEGREE OF ORIENTATION; PIEZOELECTRIC THIN FILMS; RF-MAGNETRON SPUTTERING; SUBSTRATE TEMPERATURE; SURFACE ACOUSTIC WAVES; TA2O5 THIN FILMS; TANTALUM PENTOXIDE;

THIN FILMS;

EID: 77952812471     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2009.5441475     Document Type: Conference Paper

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