|
Volumn 47, Issue 5 PART 2, 2008, Pages 3802-3806
|
Fabrication and evaluation of highly (HO)-oriented potassium niobate thin films prepared by RF-magnetron sputtering
|
Author keywords
Displacement current; Poling; Potassium niobate; Rf magnetron sputtering
|
Indexed keywords
ACOUSTIC SURFACE WAVE DEVICES;
ELECTRIC FIELDS;
MAGNETRONS;
NIOBIUM COMPOUNDS;
POTASSIUM;
SOLIDS;
TARGETS;
THICK FILMS;
THIN FILM DEVICES;
THIN FILMS;
ULTRASONIC TRANSDUCERS;
VAPOR DEPOSITION;
COMPOSITION RATIOS;
DEGREE OF ORIENTATIONS;
DEPOSITION METHODS;
DISPLACEMENT CURRENT;
DISPLACEMENT CURRENTS;
ELECTRIC-FIELD;
INTERDIGITAL TRANSDUCERS;
LATTICE PLANES;
MGO SUBSTRATES;
POLING;
POTASSIUM NIOBATE;
RADICAL SOURCES;
RF POWERS;
RF-MAGNETRON SPUTTERING;
SPONTANEOUS POLARIZATIONS;
SPUTTERING CONDITIONS;
SUBSTRATE TEMPERATURES;
TARGET SPUTTERING;
MAGNETRON SPUTTERING;
|
EID: 54949141841
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.47.3802 Document Type: Article |
Times cited : (8)
|
References (17)
|