An on-chip glass sphere resonator for label-free detection

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 831-834

  Yu, Y F ^a,b   Kanna, V ^a   Bourouina, T ^b   Ng, S H ^c   Yap, P H ^c   Liu, A Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b UNIVERSITÉ PARIS EST   (France)

^c DSO NATIONAL LABORATORIES   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BIOLOGICAL MEASUREMENT; COUPLING RATIOS; ENVIRONMENTAL MONITORING; GLASS SPHERES; HIGH SENSITIVITY; HIGH STABILITY; INPUT AND OUTPUTS; LABEL FREE; LABEL-FREE DETECTION; LOW COSTS; ON CHIPS; POLYDIMETHYLSILOXANE PDMS; POTENTIAL APPLICATIONS; PRISM COUPLER; PROTEIN CONCENTRATIONS; PTFE FILMS; QUALITY FACTORS; REAL TIME;

CHEMICAL STABILITY; GLASS; LABELS; MECHANICAL ENGINEERING; MECHANICS; MICROCHANNELS; OPTICAL FIBERS; Q FACTOR MEASUREMENT; REACTIVE ION ETCHING; REFRACTIVE INDEX; RESONATORS; SILICONES; SPHERES;

CHEMICAL DETECTION;

GLASS; LABELS; MECHANICAL ENGINEERING; MECHANICS; POLYSILICONES; REFRACTIVITY; SPHERES;

EID: 77952776660     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442277     Document Type: Conference Paper

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