Coaxial tip piezoresistive scanning probes for high-resolution electrical imaging

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 344-347

  Harjee, N ^a   Garcia, A G F ^a   Konig M ^a   Doll, J C ^a   Goldhaber Gordon, D ^a   Pruitt, B L ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BROAD APPLICATION; CANTILEVER DEFLECTION; DOPANT PROFILING; ELECTRICAL IMAGING; HIGH RESOLUTION; LATERAL RESOLUTION; LOCAL ELECTRIC FIELD; PIEZO-RESISTIVE; PIEZORESISTOR; SCANNING GATE MICROSCOPY; SCANNING PROBES; SEMICONDUCTOR NANOSTRUCTURES; SILICON CANTILEVER; VERTICAL DISPLACEMENTS;

ATOMIC FORCE MICROSCOPY; ELECTRIC FIELDS; ELECTRIC PROPERTIES; MECHANICAL ENGINEERING; MECHANICS; NANOCANTILEVERS; REACTIVE ION ETCHING; SCANNING;

PROBES;

EID: 77952770818     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442494     Document Type: Conference Paper

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