A MEMS tunable metamaterial filter

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 196-199

  Zhu, W M ^a,c   Cai, H ^b   Mei, T ^a   Bourouina, T ^c   Tao, J F ^a   Lo, G Q ^b   Kwong, D L ^b   Liu, A Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

^c ESIEE PARIS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMBDRIVE; MICROELECTROMECHANICAL SYSTEMS; MICROMACHINED; TERA HERTZ; TUNABILITIES; TUNABLE METAMATERIALS; TUNING RANGES; UNIT CELLS;

COMPOSITE MICROMECHANICS; FREQUENCY BANDS; MECHANICAL ENGINEERING; MECHANICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL PROPERTIES; REACTIVE ION ETCHING;

METAMATERIALS;

EID: 77952753203     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442533     Document Type: Conference Paper

References (14)

1. S. Zhang, D. A. Genov, Y. Wang, M. Liu and X. Zhang, " Plasmon-induced transparency in metamaterials", Phys. Revi. Lett., vol. 101, 047401, 2008.
2. M. Patterson, S. Hughes, S. Combrie, N. V. Q. Tran and A. D. Rossi, "Disorder-induced coherent scattering in slow-light photonic crystal waveguides", Phys. Revi. Lett., vol. 102, 253903, 2009.
3. I. A. I. AI-Baib, C. Jansen and M. Koch, "Thin-film sensing with planar asymmetric metamaterial resonators", Appl. Phys. Lett., vol. 93, 083507, 2008.
4. K. L. Tsakmakidis, A. D. Boardman and O. Hess, "Trapped rainbow storage of light in metamaterials", Nature, vol. 450, pp. 397-401, 2007.
5. A. Alu and N. Engheta, " Dielectric sensing in ε-near-zero narrow waveguide channels", Phys. Revi. B, vol. 78, 045102, 2008.
6. H. T. Chen, W. J. Padilla, J. M. O. Zide, A. C. Gossard, A. J. Taylor and R. D. Averitt, "Active terahertz metamaterial devices", Nature, vol. 444, pp. 597-600, 2006.
7. H. Cai, A. Q. Liu, X. M. Zhang, J. Tamil, Q. X. Zhang, D. Y. Tang, C. Lu, "A miniature tunable coupled-cavity laser constructed by micromachining technology", Appl. Phys. Lett., vol. 92, No.03, 031105, 2008.
8. X. M. Zhang, A. Q. Liu, C. Lu and D. Y. Tang, "A real pivot structure for MEMS tunable lasers", IEEE JMEMS, vol. 16, pp. 269-278, 2007.
9. H. Tao, A. Strikwerda, K. Fan, W. J. Padilla, R. D. Averitt and X. Zhang, "Terahertz metamaterials with simultaneously negative electric and magnetic resonance responses based on biomaterial pop structures", Proc. IEEE. MEMS2009, pp. 108-111, 2009.
10. W. M. Zhu, X. M. Zhang, A. Q. Liu, H. Cai, J. Tamil, And T. Buorouina, "A micromachined optical double well for thermo-optic switching via resonant tunneling effect", Appl. Phys. Lett., vol. 92, No.25, 251101, 2008.
11. J. P. Zhao, H. L. Chen, J. M. Huang and A. Q. Liu, "A study of dynamic characteristics and simulation of MEMS torsional micromirrors", Sensors and Actuators A, vol. 120, pp. 199-210.
12. X. M. Zhang, A. Q. Liu, C. Lu, and D. Y. Tang, "Continuous wavelength tuning in micromachined Littrow external-cavity lasers," IEEE J. Quan. Electron., vol. 41, no. 2, pp. 187-197, 2005..
13. X. M. Zhang, F. S. Chau, C. Quan and A. Q. Liu, "Modeling of the optical torsion micromirror", Proc. SPIE. Inter. Soci. Optic. Eng., vol 3899, 1999.
14. C. Caloz and T. Itoh, "Electromagnetic Metamaterials: Transmission Line Theory and Microwave Applications", (John Wiley & Sons, 2006).