Large panel hot roller embossing for polymeric microfluidic devices

Proceedings of the 11th International Conference on Miniaturized Systems for Chemistry and Life Sciences, uTAS 2007

Volumn , Issue , 2007, Pages 1738-1740

  Ng, S H ^a   Wang, Z F ^a   de Rooij, N F ^b  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Embossing; Microfluidics; Polymer; Roller

Indexed keywords

MICROFLUIDICS; POLYMERS;

FEATURE SIZES; HOT ROLLERS; LATERAL DIMENSION; POLYMER SUBSTRATE; POLYMERIC MICROFLUIDIC DEVICES;

ROLLERS (MACHINE COMPONENTS);

EID: 77952616316     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. T. Thorsen, S. J. Maerkl, and S. R. Quake, Microfluidic large-scale integration, Science, 298, pp. 580, (2002).
2. H. Tan, A. Gilbertson, and S. Y. Chou, Roller nanoimprint lithography, Journal of Vacuum Science Technology B, 16, pp. 3926, (1998).
3. H. C. Scheer and H. Schulz, A contribution to the flow behaviour of thin polymer films during hot embossing lithography, Microelectronic Engineering, 56, pp. 311, (2001).