Plasmas for texturing, cleaning, and deposition: Towards a one pump down process for heterojunction solar cells

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 7, Issue 3-4, 2010, Pages 1112-1115

  Moreno, Mario ^a   Daineka, Dmitri ^a   Roca I Cabarrocas, Pere ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

A-SI:H; EFFECTIVE LIFETIME; FABRICATION PROCESS; GAS RATIO; HETEROJUNCTION SOLAR CELLS; HIGH EFFICIENCY; LIGHT-TRAPPING; LOW COSTS; LOW TEMPERATURE PLASMA DEPOSITION; NATIVE OXIDE REMOVAL; NATIVE OXIDES; OPTIMIZED CONDITIONS; PLASMA PROCESS; REFLECTANCE VALUES; RF-PECVD; RF-POWER; SI SURFACES; SI WAFER; SURFACE RECOMBINATION VELOCITIES; SURFACE REFLECTANCE; TEXTURED SURFACE;

CHEMICAL VAPOR DEPOSITION; DEPOSITION; HETEROJUNCTIONS; OPEN CIRCUIT VOLTAGE; PASSIVATION; PLASMA DEPOSITION; PLASMAS; REFLECTION; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SOLAR CELLS; TEXTURING;

SILICON WAFERS;

EID: 77952564537     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200982704     Document Type: Conference Paper

References (16)

1. European Photovoltaic Industry Association, Solar Generation V, 18-20 (2008).
2. M. A. Green, J. Zhao, A. Wang and S. R Wenham, IEEE Trans. Electron. Devices 46(10), 1940-1947 (1999).
3. J. Yoo, Kyunghae Kim, M. Thamilselvan, N. Lakshminarayan, Young Kuk Kim, Jaehyeong Lee, Kwon Jong Yoo, and Junsin Yi, J. Phys. D: Appl. Phys. 1-7 (2008).
4. Y. Tsunomura, Y. Yoshimine, M. Taguchi, T. Baba, T. Kinoshita, H. Kanno, H. Sakata, E. Maruyama, and M. Tanaka, Sol. Energy Mater. Sol. Cells 93, 670-673 (2009).
5. M. Reuter, W. Brendle, O. Tobail, and J. H. Werner, Sol. Energy Mater. Sol. Cells 93, 704-706 (2009).
6. D. L. King and M. E. Buck, in: Proceedings of IEEE Photovoltaic Specialist Conference, 1991, pp. 303-308.
7. J. M. Kim and Y. K. Kim, Sol. Energy Mater. Sol. Cells 81, 239-247 (2004).
8. E. Vazsonyi, K. De Clercq, R. Einhaus, E. Van Kerschaver, K Said, J. Poortmans, J. Szlufcik, and J. Nijs, Sol. Energy Mater. Sol. Cells 57, 179-188 (1999).
9. M. Edwards, S. Bowden, U. Das, and M. Burrows, Sol. Energy Mater. Sol. Cells 92, 1373-1377 (2008).
10. D. Iencinella, E. Centurioni, R. Rizzoli, and F. Zignani, Sol. Energy Mater. Sol. Cells 87, 725-732 (2005).
11. G. W. Trucks, K. Raghavachari, G. S. Higashi, and Y. J. Chabal, Phys. Rev. Lett. 65, 504-507 (1990).
12. H. F. W. Dekkers, F. Duerinckx, L. Carnel, G. Agostinelli, and G. Beaucarne, in: Proceedings 21st European Photovoltaic Solar Energy Conference (Dresden, Germany, 2006), pp. 754-757.
13. M. Tucci, R. de Rosa, and F. Roca, Sol. Energy. Mater. Sol. Cells 69, 175-185 (2001).
14. I. Martin, M. Vetter, A. Orpella, C. Voz, J. Puigdollers, and R. Alcubilla, Appl. Phys. Lett. 84(9), 1474-1476 (2004).
15. N. Layadi, P. Roca i Cabarrocas, and B. Drévillon, Phys. Rew. B 52(7), 5136-5144 (1995).
16. E. A. Irene, Thin Solid Films 233, 96-111 (1993).