Fabrication of a surface stress-based PDMS micro-membrane biosensor

Microsystem Technologies

Volumn 16, Issue 6, 2010, Pages 1001-1008

  Sang, Shengbo ^a   Witte, Hartmut ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEMS; BIOSENSOR ARRAYS; BOND STRENGTH; BONDING TECHNIQUES; BULK MICROFABRICATION; ESCHERICHIA COLI (E. COLI); INTERMEDIATE LAYERS; MEMBRANE DEFLECTIONS; MICRO-FLUIDIC DEVICES; MICROFABRICATION PROCESS; POLYDIMETHYLSILOXANE PDMS; SURFACE STRESS; WHOLE PROCESS;

BONDING; ESCHERICHIA COLI; MICROANALYSIS; MICROCHANNELS; MICROFABRICATION; MICROMACHINING; SILICONES; SURFACE PROPERTIES;

BIOSENSORS;

EID: 77952422328     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-010-1077-x     Document Type: Article

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