SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 3, 2010, Pages 419-424

Electrostatic quadrupole plasma mass spectrometer measurements during thin film depositions using simultaneous matrix assisted pulsed laser evaporation and magnetron sputtering

(4) Hunter, C N a Check, M H b Muratore, C a Voevodin, A A a

a AIR FORCE RESEARCH LABORATORY (United States)

b UNIVERSAL TECHNOLOGY CORPORATION (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON PLASMAS; ARGON-OXYGEN MIXTURES; CARBON CONTAMINATION; CARBON DEPOSITES; CARBON DISTRIBUTION; CARBON IMPURITIES; CARBON NANOPEARLS; CO-DEPOSITED FILMS; CODEPOSITION PROCESS; COMPOSITE THIN FILMS; DEPOSITED FILMS; DEPOSITION CHAMBERS; DEPOSITION PROCESS; ELECTROSTATIC QUADRUPOLE; ELEMENTAL MAPPING; ENERGY DISPERSIVE SPECTROMETRY; HIGH-RESOLUTION TEM; HYBRID PLASMA; HYBRID PROCESS; MAGNETRON SPUTTER; MAGNETRON SPUTTERING PROCESS; MATRIX; MATRIX ASSISTED PULSED LASER EVAPORATION; NANO SCALE; PLASMA ANALYSIS; PLASMA MASS SPECTROMETERS; REACTIVE OXYGEN SPECIES; SPUTTER RATE; SPUTTER YIELDS; TEM; THIN-FILM DEPOSITIONS; TOLUENE VAPORS;

ARGON; CARBON FILMS; CHEMICAL VAPOR DEPOSITION; COMPOSITE FILMS; ELECTROSTATICS; EVAPORATION; GOLD; GOLD COATINGS; GOLD COMPOUNDS; MAGNETRON SPUTTERING; MASS SPECTROMETRY; OPTIMIZATION; OXYGEN; PLASMA DEPOSITION; PLASMA DIAGNOSTICS; PLASMAS; PULSED LASER APPLICATIONS; PULSED LASERS; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); TARGETS; THIN FILMS; TOLUENE; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

GOLD DEPOSITS;

EID: 77952414580 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.3372401 Document Type: Article

Times cited : (7)

References (18)

1
- 0032225908
- Matrix assisted pulsed laser evaporation (MAPLE) of functionalized polymers: Applications with chemical sensors
- DOI 10.1117/12.309520
- Andrew R. McGill, Douglas B. Chrisey, Alberto Pique, and Todd E. Mlsna, Proc. SPIE PSISDG 0277-786X 3274, 255 (1998). 10.1117/12.309520 (Pubitemid 35018577)
- (1998) Proceedings of SPIE - The International Society for Optical Engineering , vol.3274 , pp. 255-266
- McGill, R.A.¹ Chrisey, D.B.² Pique, A.³ Mlsna, T.E.⁴

2
- 0033364927
- Growth of organic thin films by the matrix assisted pulsed laser evaporation (MAPLE) technique
- DOI 10.1016/S0257-8972(99)00376-X
- A. Piqú, Thin Solid Films THSFAP 0040-6090 355-356, 536 (1999). 10.1016/S0257-8972(99)00376-X (Pubitemid 30523257)
- (1999) Thin Solid Films , vol.355 , pp. 536-541
- Pique, A.¹ McGill, R.A.² Chrisey, D.B.³ Leonhardt, D.⁴ Mslna, T.E.⁵ Spargo, B.J.⁶ Callahan, J.H.⁷ Vachet, R.W.⁸ Chung, R.⁹ Bucaro, M.A.¹⁰

3
- 0037185135
- Processing of functional polymers and organic thin films by the matrix-assisted pulsed laser evaporation (MAPLE) technique
- DOI 10.1016/S0169-4332(01)00704-8, PII S0169433201007048
- A. Piqú, P. Wu, B. R. Ringeisen, D. M. Bubb, J. S. Melinger, R. A. McGill, and D. B. Chrisey, Appl. Surf. Sci. ASUSEE 0169-4332 186, 408 (2002). 10.1016/S0169-4332(01)00704-8 (Pubitemid 34231962)
- (2002) Applied Surface Science , vol.186 , Issue.1-4 , pp. 408-415
- Pique, A.¹ Wu, P.² Ringeisen, B.R.³ Bubb, D.M.⁴ Melinger, J.S.⁵ McGill, R.A.⁶ Chrisey, D.B.⁷

4
- 19744368006
- High laser-fluence deposition of organic materials in water ice matrices by "mAPLE"
- DOI 10.1016/j.apsusc.2005.01.175, PII S0169433205001790
- B. Toftmann, K. Rodrigo, J. Schou, and R. Pedrys, Appl. Surf. Sci. ASUSEE 0169-4332 247, 211 (2005). 10.1016/j.apsusc.2005.01.175 (Pubitemid 40743461)
- (2005) Applied Surface Science , vol.247 , Issue.1-4 , pp. 211-216
- Toftmann, B.¹ Rodrigo, K.² Schou, J.³ Pedrys, R.⁴

5
- 55049126061
- SCTEEJ 0257-8972,. 10.1016/j.surfcoat.2008.09.003
- C. N. Hunter, M. H. Check, J. E. Bultman, and A. A. Voevodin, Surf. Coat. Technol. SCTEEJ 0257-8972 203, 300 (2008). 10.1016/j.surfcoat.2008.09.003
- (2008) Surf. Coat. Technol. , vol.203 , pp. 300
- Hunter, C.N.¹ Check, M.H.² Bultman, J.E.³ Voevodin, A.A.⁴

6
- 33847221126
- LAPHEJ 1054-660X,. 10.1134/S1054660X0702003X
- M. Jelinek, T. Kocourek, J. Remsa, R. Cristescu, I. N. Mihailescu, and D. B. Chrisey, Laser Phys. LAPHEJ 1054-660X 17, 66 (2007). 10.1134/ S1054660X0702003X
- (2007) Laser Phys. , vol.17 , pp. 66
- Jelinek, M.¹ Kocourek, T.² Remsa, J.³ Cristescu, R.⁴ Mihailescu, I.N.⁵ Chrisey, D.B.⁶

7
- 4544313834
- THSFAP 0040-6090,. 10.1016/j.tsf.2004.06.012
- A. Levesque, Vu Thien Binh, V. Semet, D. Guillot, R. Y. Fillit, M. D. Brookes, and T. P. Nguyen, Thin Solid Films THSFAP 0040-6090 464-465, 308 (2004). 10.1016/j.tsf.2004.06.012
- (2004) Thin Solid Films , vol.464-465 , pp. 308
- Levesque, A.¹ Thien Binh, V.² Semet, V.³ Guillot, D.⁴ Fillit, R.Y.⁵ Brookes, M.D.⁶ Nguyen, T.P.⁷

8
- 0000355897
- JVSTAL 0022-5355,. 10.1116/1.1315386
- J. W. Coburn and E. Kay, J. Vac. Sci. Technol. JVSTAL 0022-5355 8, 738 (1971). 10.1116/1.1315386
- (1971) J. Vac. Sci. Technol. , vol.8 , pp. 738
- Coburn, J.W.¹ Kay, E.²

9
- 0015483966
- JAPIAU 0021-8979,. 10.1063/1.1661054
- J. W. Coburn and E. Kay, J. Appl. Phys. JAPIAU 0021-8979 43, 4965 (1972). 10.1063/1.1661054
- (1972) J. Appl. Phys. , vol.43 , pp. 4965
- Coburn, J.W.¹ Kay, E.²

10
- 77952366112
- Ph.D. dissertation, Colorado School of Mines.
- C. Muratore, " The influence of particle energy distributions on reactively sputtered titanium oxide and titanium nitride thin film compounds.," Ph.D. dissertation, Colorado School of Mines, 2002.
- (2002) The Influence of Particle Energy Distributions on Reactively Sputtered Titanium Oxide and Titanium Nitride Thin Film Compounds
- Muratore, C.¹

11
- 33846245069
- Electron impact ionization cross-sections of toluene
- DOI 10.1016/j.cplett.2006.12.014, PII S0009261406018069
- J. R. Vacher, F. Jorand, N. Blin-Simiand, and S. Pasquiers, Chem. Phys. Lett. CHPLBC 0009-2614 434, 188 (2007). 10.1016/j.cplett.2006.12.014 (Pubitemid 46096904)
- (2007) Chemical Physics Letters , vol.434 , Issue.4-6 , pp. 188-193
- Vacher, J.R.¹ Jorand, F.² Blin-Simiand, N.³ Pasquiers, S.⁴

12
- 77952347513
- Gas Phase Ion-Molecule Reaction Rate Constants Through 1986.
- I. Ikezoe, S. Matsuoka, M. Takebe, and A. Viggiano, Gas Phase Ion-Molecule Reaction Rate Constants Through 1986, 1987.
- (1987)
- Ikezoe, I.¹ Matsuoka, S.² Takebe, M.³ Viggiano, A.⁴

13
- 0032761268
- JNUMAM 0022-3115,. 10.1016/S0022-3115(98)00489-9
- B. Landkammer, A. von Keudell, and W. Jacob, J. Nucl. Mater. JNUMAM 0022-3115 264, 48 (1999). 10.1016/S0022-3115(98)00489-9
- (1999) J. Nucl. Mater. , vol.264 , pp. 48
- Landkammer, B.¹ Von Keudell, A.² Jacob, W.³

14
- 0035400559
- Carbon reactivity in an oxygen plasma: A comparison with reactivity in molecular oxygen
- DOI 10.1016/S0008-6223(00)00235-9, PII S0008622300002359
- A. Cuesta, A. Martinez-Alonso, and J. M. D. Tascon, Carbon CRBNAH 0008-6223 39, 1135 (2001). 10.1016/S0008-6223(00)00235-9 (Pubitemid 32427156)
- (2001) Carbon , vol.39 , Issue.8 , pp. 1135-1146
- Cuesta, A.¹ Martinez-Alonso, A.² Tascon, J.M.D.³

15
- 0000150913
- CRBNAH 0008-6223,. 10.1016/S0008-6223(97)00180-2
- L. E. Cascarini de Torre, E. J. Bottani, A. Martinez-Alonso, A. Cuesta, A. B. García, and J. M. D. Tascón, Carbon CRBNAH 0008-6223 36, 277 (1998). 10.1016/S0008-6223(97)00180-2
- (1998) Carbon , vol.36 , pp. 277
- Cascarini De Torre, L.E.¹ Bottani, E.J.² Martinez-Alonso, A.³ Cuesta, A.⁴ García, A.B.⁵ Tascón, J.M.D.⁶

16
- 0009818586
- 10.1063/1.1319163
- X. B. Tian, D. T. K. Kwok, P. K. Chu, J Appl. Phys. 88 (9), 4961 (2000) 10.1063/1.1319163
- (2000) J Appl. Phys. , vol.88 , Issue.9 , pp. 4961
- Tian, X.B.¹ Kwok, D.T.K.² Chu, P.K.³

17
- 0030096316
- Energy dependence of ion-induced sputtering yields from monatomic solids at normal incidence
- DOI 10.1006/adnd.1996.0005
- Y. Yamamura and H. Tawara, At. Data Nucl. Data Tables ADNDAT 0092-640X 62, 149 (1996). 10.1006/adnd.1996.0005 (Pubitemid 126171389)
- (1996) Atomic Data and Nuclear Data Tables , vol.62 , Issue.2 , pp. 149-253
- Yamamura, Y.¹ Tawara, H.²

18
- 33751216772
- Plasma diagnostics of hybrid magnetron sputtering and pulsed laser deposition
- DOI 10.1016/j.surfcoat.2006.08.096, PII S0257897206008486
- J. G. Jones, C. Muratore, A. R. Waite, and A. A. Voevodin, Surf. Coat. Technol. SCTEEJ 0257-8972 201, 4040 (2006). 10.1016/j.surfcoat.2006.08.096 (Pubitemid 44783115)
- (2006) Surface and Coatings Technology , vol.201 , pp. 4040-4045
- Jones, J.G.¹ Muratore, C.² Waite, A.R.³ Voevodin, A.A.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.