Monolithic micro gas chromatographic separation column and detector

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2010, Pages 907-910

  Kaanta, Bradley ^a   Chen, Hua ^b   Zhang, Xin ^a  

^a BOSTON UNIVERSITY   (United States)

^b SCHLUMBERGER DOLL RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BATCH FABRICATION; DISCRETE COMPONENTS; ECONOMIES OF SCALE; GAS CHROMATOGRAPHY SEPARATIONS; HIGH-SENSITIVITY DETECTORS; HIGH-SPEED GC; INTEGRATED DEVICE; LABOR INTENSIVE; MICRO-GAS; MONOLITHIC INTEGRATION; MONOLITHICALLY INTEGRATED; SEPARATION COLUMN;

COLUMN CHROMATOGRAPHY; DETECTORS; HELIUM; LIQUID CHROMATOGRAPHY; MECHANICAL ENGINEERING; MECHANICS; MONOLITHIC INTEGRATED CIRCUITS; REACTIVE ION ETCHING;

GAS CHROMATOGRAPHY;

EID: 77952007868     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2010.5442354     Document Type: Conference Paper

References (13)

1. E.B. Overton et al, "Fast GC instrumentation and analysis for field applications," Field Analyt. Chem. Techenol., vol. 5, pp.97-105, 2001
2. O.A. Sandik, A. V. Wanekaya, s.Andreescu, "Advances in analytical technologies for environmental protection and public safety," J. Environment. Monitor., vol.6, pp. 513-522, 2004
3. H. Yu; L. Xu, M. Cao, X. Chen, P. Wang, J. Jiao, Y. Wang, "Detection volatile organic compounds in breath as markers of lung cancer using a novel electronic nose", Proc. of IEEE Sensors 2003, Vol. 2, pp. 1333-1337, 2003.
4. F. A. Settle, handbook of Instrumental Techniques for Analytical Chemistry. Englewood Cliffs, NJ: Prentica - Hall, 1997
5. B.C. Kaanta, et al, "Hight Sensetivity Micro-Thermal Conductivitiy Detector." IEEE MEMS 2009
6. S. Terry, J. Jerman, J. Angell, "A gas chromatographic air analyzer fabricated on a silicon wafer," IEEE Trans. Electron Devices, vol. ED-26, no. 12, pp. 1880-1886, Dec. 1979
7. C. Yu et al., "A high performance hand-held gas chromatograph," in Proc. IEEE Conf. MEMS, Nov. 1998, pp. 481-486
8. G. Frye-Mason et al., "Integrated chemical analysis systems for gas phase CW agent detection," in Proc. uTAS, 1998, pp. 477-480
9. M. Agah et al., "High-Performance Temperature-Programmed Microfabricated Gas Chromatography Columns," J. Microelectromech. Syst. Vol. 14, pp. 1039-1050, 2005
10. J. Potkay, et al., "A Low-Power Pressure- and Temperature- Programmable Micro Gas Chromatography Column," J. Microelectromech. Syst. Vol. 16, pp. 1071-1079, 2007
11. G. Gaspar et al. "Influence of Instrumental Contributions on the Apparent Column Efficiency in High Speed Gas Chromatography," Anal. Chem., Vol. 50, No 11, pp. 1512-1518, 1978
12. R. Grob, Modern Practice of Gas Chromatography. New Jersey: Wiley, 2004
13. S. D. Senturia, "Microsystem Design," Kluwer Academic Publishers, 4th ed, 2002