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Volumn 1998-AE, Issue , 1998, Pages 481-486

A High Performance Hand - Held Gas Chromatograph

Author keywords

Hand Held real time detection gas chromatograph was fabricated using MEMS technology

Indexed keywords

CHEMICAL DETECTION; FABRICATION; GASES; HEAT TRANSFER; PALMPRINT RECOGNITION; SIGNAL DETECTION; SILICON NITRIDE; SILICON WAFERS;

EID: 0002999041     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE1998-1288     Document Type: Conference Paper
Times cited : (2)

References (10)
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    • Walter Jennings, "Gas Chromatography with Glass Capillary Columns" Department of Food Science and Technology, University of California, Davis, California, 2nd Edition Academic Press (1980).
    • (1980) Gas Chromatography with Glass Capillary Columns
    • Jennings, Walter1
  • 3
    • 0018653907 scopus 로고
    • A Gas Chromatograph Air Analyzer Fabricated on a Silicon Wafer
    • S. C. Terry, J. H. Jerman, and J. B. Angell, "A Gas Chromatograph Air Analyzer Fabricated on a Silicon Wafer," IEEE Trans. Electron Devices, vol. ED-26, P. 1880,1979.
    • (1979) IEEE Trans. Electron Devices , vol.ED-26 , pp. 1880
    • Terry, S. C.1    Jerman, J. H.2    Angell, J. B.3
  • 5
    • 0017266754 scopus 로고
    • Chemical Etching of Silicon, IV. Etching Technology
    • B. Schwartz and H. Robbins, "Chemical Etching of Silicon, IV. Etching Technology," J. Electrochem. Soc., vol. 123, P. 1903,1976.
    • (1976) J. Electrochem. Soc , vol.123 , pp. 1903
    • Schwartz, B.1    Robbins, H.2
  • 6
    • 0015772701 scopus 로고
    • Controlled Preferential Etching Technology
    • H. R. Huff and R. R. Burgess, Eds. (The Electrochemical Society Softbound Symposium Ser., Princeton, N. J)
    • H. Huraoka, T. Ohhashi, and V. Sumitomo, "Controlled Preferential Etching Technology," in Semiconductor Silicon 1973, H. R. Huff and R. R. Burgess, Eds. (The Electrochemical Society Softbound Symposium Ser., Princeton, N. J.), 1973, P. 327.
    • (1973) Semiconductor Silicon 1973 , pp. 327
    • Huraoka, H.1    Ohhashi, T.2    Sumitomo, V.3
  • 7
    • 0017981972 scopus 로고    scopus 로고
    • Chemical Etching of Silicon, Germanium, Gallium Arsenide, and Gallium Phosphide
    • W. Kern, "Chemical Etching of Silicon, Germanium, Gallium Arsenide, and Gallium Phosphide," RCA Rev., vol. 29, P. 278.
    • RCA Rev , vol.29 , pp. 278
    • Kern, W.1
  • 8
    • 0025210818 scopus 로고
    • Design of an Open-Tubular Column Liquid Chromatography Using Silicon Chip Technology
    • (Hitachi, Japan)
    • A. Manz, et al. (Hitachi, Japan), "Design of an Open-Tubular Column Liquid Chromatography Using Silicon Chip Technology," Sensors and Actuators, B1 (1990), pp. 249-255
    • (1990) Sensors and Actuators , vol.B1 , pp. 249-255
    • Manz, A.1
  • 9
    • 0028741021 scopus 로고
    • Silicon micromachined Gas Chromatography System Used to Separate and Detect Ammonia and Nitrogen Dioxoide
    • R. Reston and E. Kolesar, "Silicon micromachined Gas Chromatography System Used to Separate and Detect Ammonia and Nitrogen Dioxoide," J. of Microelectromechanical Systems, vol. No. 4, (1994), pp. 134-146.
    • (1994) J. of Microelectromechanical Systems , vol.4 , pp. 134-146
    • Reston, R.1    Kolesar, E.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.