A compact high-performance germanium photodetector integrated on 0.25μm thick silicon-on-insulator waveguide

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7607, Issue , 2010, Pages

  Feng, Ning Ning ^a   Liao, Shirong ^a   Dong, Po ^a   Zheng, Dawei ^a   Liang, Hong ^a   Kung, Cheng Chih ^a   Shafiiha, Roshanak ^a   Feng, Dazeng ^a   Li, Guoliang ^b   Cunningham, John E ^b   Krishnamoorthy, Ashok V ^b   Asghari, Mehdi ^a  

^a KOTURA INC   (United States)

^b SUN MICROSYSTEMS   (United States)

Author keywords

Germanium photodetector; Integrated optics devices; Optical interconnects; Silicon on insulator

Indexed keywords

1550 NM; 3 DB BANDWIDTH; AT-WAVELENGTH; EPITAXIALLY GROWN; INTEGRATED OPTICS DEVICES; P-I-N PHOTODETECTORS; RESPONSIVITY; SILICON ON INSULATOR; SILICON ON INSULATOR WAVEGUIDE; SOI WAVEGUIDES; THIN LAYERS;

INTEGRATED OPTICS; OPTICAL INTERCONNECTS; OPTICAL MATERIALS; OPTOELECTRONIC DEVICES; PHOTODETECTORS; PHOTONICS; WAVEGUIDES;

GERMANIUM;

EID: 77951780754     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.841052     Document Type: Conference Paper

References (18)

1. L. C. Kimerling, D. Ahn, A. B. Apsel, M. Beals, D. Carothers, Y-K. Chen, T. Conway, D. M. Gill, M. Grove, C-Y Hong, M. Lipson, J. Liu, J. Michel, D. Pan, S. S. Patel, A. T. Pomerene, M. Rasras, D. K. Sparacin, K-Y. Tu, A. E. White, and C. W. Wong, " Electronic-photonic integrated circuits on the CMOS platform," Proc. SPIE 6125, 612502, 2006.
2. L. C. Kimerling, L. Dal Negro, s. Saini, Y. Yi, D. Ahn, S. Akiyama, D. Cannon, J. Liu, J. G. Sandland, D. Sparacin, J. Michel, K. Wada and M. R. Watts, "Monolithic silicon microphotonics,," in Silicon Photonics: Topics in Applied Physics, L. Pavesi and D. J. Lockwood, eds., (Springer, Berlin, 2004) vol.94.
3. G. T. Reed and A. Knights, Silicon Photonics, (Wiley, 93-97, 2004).
4. A. V. Krishnamoorthy, R. Ho, X. Zheng, H. Schwetman, J. Lexau, P. Koka, G. Li, I. Shubin, and J. E. Cunningham, "Computer Systems Based on Silicon Photonic Interconnects," Proceedings of the IEEE 97, 1337-1361 (2009).
5. O. Boyraz and B. Jalali, "Demonstration of a silicon Raman laser," Opt. Express 12, 5269 (2004).
6. H. Rong, R. Jones, A. Liu, O. Cohen, D. Hak, A. Fang, and M. Paniccia, "A continuous-wave Raman silicon laser," Nature 433, 725 (2005).
7. A. Fang, H. Park, O. Cohen, R. Jones, M. Paniccia, and J. E. Bowers, "Electrically pumped hybrid AlGaInAs-silicon evanescent laser," Opt. Express 14, 9203 (2006).
8. A. Liu, R. Jones, L. Liao, D.Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615 (2004).
9. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson "Micrometre-scale silicon electro-optic modulator," Nature 435, 325 (2005).
10. J. Liu, M. Beals, A. Pomerene, S. Bernardis, R. Sun, J. Cheng, L. C. Kimerling, and J. Michel, "Waveguide-integrated, ultralow-energy GeSi electro-absorption modulators," Nature Photonics 2, 433 (2008).
11. P. Dong, S. Liao, D. Feng, H. Liang, D. Zheng, R. Shafiiha, C.-C. Kung, W. Qian, G. Li, X. Zheng, A. V. Krishnamoorthy, and M. Asghari, "Low Vpp, ultralow-energy, compact, high-speed silicon electro-optic modulator," Opt. Exp., 17, 22484 (2009).
12. J. Liu, D. D. Cannon, K. Wada, Y. Ishikawa, S. Jongthammanurak, D. T. Danielson, J. Michel, and L. C. Kimerling, "Tensile strained Ge p-i-n photodetectors on Si platform for C and L band telecommunications," Appl. Phys. Lett., 87, 011110 (2005).
13. D. Ahn, C-Y. Hong, J. Liu, W. Giziewics, M. Beals, L. C. Kimerling, and J. Michel, "High performance, waveguide integrated Ge photodetectors," Opt. Express, 15, 3916 (2007).
14. T. Yin, R. Cohen, M. Morse, G. Sarid, Y. Chetrit, D. Rubin, and M. Paniccia, "31 GHz Ge n-i-p waveguide photodetectors on Silicon-on-insulator substrate," Opt. Express, 15, 13965 (2007).
15. L. Vivien, J. Osmond, J.-M. Fedeli, D. Marris-Morini, P. Crozat, J.-F. Damlencourt, E. Cassan, Y. Lecunff, S. Laval, "42 GHz p.i.n Germanium photodetector integrated in a silicon-on-insulator waveguide," Opt. Express 16, 6252 (2008).
16. L. Chen and M. Lipson, "Ultra-low capacitance and high speed germanium photodetectors on silicon," Opt. Express 17, 7901 (2009).
17. D. Feng, S. Liao, P. Dong, N.-N. Feng, D. Zheng, H. Liang, R. Shafiiha, G. Li, J. Cunningham, K. Raj, A. V. Krishnamoorthy, and M. Asghari, "Compact, high-responsivity and high-speed Ge photodetector integrated with a large cross-section SOI waveguide," Appl. Phys. Lett., 95, 261105 (2009).
18. N.-N. Feng, P. Dong, D. Zheng, S. Liao, H. Liang, R. Shafiiha, D. Feng, G. Li, J. E. Cunningham, A. V. Krishnamoorthy, and M. Asghari, "Vertical p-i-n germanium photodetector with high external responsivity integrated with large core Si waveguides," Opt. Exp., 18, 96 (2010).