Microstructuring and wafering of silicon with laser chemical processing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7585, Issue , 2010, Pages

  Hopman, Sybille ^a   Fell, Andreas ^a   Mayer, Kuno ^a   Rodofili, Andreas ^a   Granek, Filip ^a  

^a FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

Author keywords

Diffusion; Doping; Laser chemical processing; Laser processing; Local back surface field; Selective emitter; Wafering

Indexed keywords

BACK SURFACE FIELDS; LASER CHEMICAL PROCESSING; LASER PROCESSING; LOCAL BACK SURFACE FIELD; SELECTIVE EMITTERS;

ABLATION; AUTOMOBILE SEATS; CHEMICAL INDUSTRY; DOPING (ADDITIVES); INDICATORS (CHEMICAL); LIQUIDS; PARAMETER ESTIMATION; SEMICONDUCTING SILICON COMPOUNDS; SOLAR CELLS;

LASER CHEMISTRY;

EID: 77951729707     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.841340     Document Type: Conference Paper

References (27)

1. Kray, D., Hopman, S., Spiegel, A., Richerzhagen, B., and Willeke, G., P., "Study on the edge isolation of industrial silicon solar cells with waterjet-guided laser," Solar Energy Materials and Solar Cells 91(17), 1638-1644 (2007). (Pubitemid 47259359)
2. Wenham, S., R., Honsberg, C., B., and Green, M., A., "Buried contact silicon solar cells," Solar Energy Materials and Solar Cells 34, 101-110 (1994).
3. Wenham, S.R. and Green, M.A., "Buried contact solar cell," in US Patent. 1988, Unisearch Limited: USA.
4. Schneiderlöchner, E., Preu, R., Lüdemann, R., and Glunz, S., W., "Laser-fired rear contacts for crystalline silicon solar cells," Progress in Photovoltaics: Research and Applications 10, 29-34 (2002).
5. Esturo-Breton, A., Ametowobla, M., Carlsson, C., Köhler, J., and Werner, J., "15.4 % efficiency silicon solar cells with laser doped emitter," Proceedings of the 21st European Photovoltaic Solar Energy Conference, Dresden, Germany, 1247-9 (2006).
6. Hopman, S., Fell, A., Mayer, K., Aleman, M., Mesec, M., Müller, R., Kray, D., and Willeke, G., P., "Characterization of laser doped silicon wafers with laser chemical processing," Proceedings of the 22nd European Photovoltaic Solar Energy Conference Milan, Italy, 1257-61 (2007).
7. Kray, D., Alemán, M., Fell, A., Hopman, S., Mayer, K., Mesec, M., Müller, R., Willeke, G., P., Glunz, S., W., Bitnar, B., Neuhaus, D., H., Lüdemann, R., Schlenker, T., Manz, D., Bentzen, A., Sauar, E., Pauchard, A., Richerzhagen, B., "Laser-doped silicon solar cells by laser chemical processing (LCP) exceeding 20% efficiency," Proceedings of the 33rd IEEE Photovoltaic Specialists Conference, San Diego, USA (2008).
8. Ghassemieh, E., Versteeg, H., K., and Acar, M., "The effect of nozzle geometry on the flow characteristics of small water jets," Journal of Mechanical Engineering Science 220(12), 1739-1753 (2006). (Pubitemid 46099356)
9. Mette, A., Schetter, C., Wissen, D., Lust, S., Glunz, S., W., and Willeke, G., P., "Increasing the efficiency of screen-printed silicon solar cells by light-induced silver plating," Proceedings of the 4th World Conference on Photovoltaic Energy Conversion, Waikoloa, Hawaii, USA, 1056-9 (2006).
10. Schneiderlöchner, E., Preu, R., Lüdemann, R., Glunz, S., W., and Willeke, G., P., "Laser-fired contacts (LFC)," Proceedings of the 17th European Photovoltaic Solar Energy Conference, Munich, Germany, 1303-6 (2001).
11. Meier, D., L. and Schroder, D., K., "Contact resistance: its measurement and relative importance to power loss in a solar cell," IEEE Transactions on Electron Devices 31(5), 647-653 (1984).
12. Sinton, R., A. and Cuevas, A., "A quasi-steady-state open-circuit voltage method for solar cell characterization," Proceedings of the 16th European Photovoltaic Solar Energy Conference, Glasgow, UK, 1152-5 (2000).
13. Fell, A., Kray, D., and Willeke, G., P., "Transient 3D/2D simulation of laser-induced ablation of silicon," Applied Physics A 92(4), 987-991 (2008).
14. Fell, A., Kray, D., Wütherich, T., R., M., Willeke, G., P., and Glunz, S., W., "Simulation of phase changes and dopant diffusion in silicon for the manufacturing of selective phosphorous emitters via laser chemical processing," Proceedings of the 23rd European Photovoltaic Solar Energy Conference, Valencia, Spain, 272-4 (2008).
15. Schroder, D.K., [Semiconductor Material and Device Characterization], John Wiley & Sons, New York, (1990).
16. Rodofili, A., Hopman, S., Fell, A., Mayer, K., Mesec, M., Granek, F., and Glunz, S., W., "Characterization of doping via laser chemical processing (LCP)," Proceedings of the 24th European Photovoltaic Solar Energy Conference, Hamburg, Germany (2009).
17. Berger, H., H., "Contact resistance and contact resistivity," Journal of the Electrochemical Society 119(4), 507-514 (1972).
18. Berger, H., H., "Models for contacts to planar devices," Solid-State Electronics 15, 145-158 (1972).
19. Aberle, A., G., Wenham, S., R., Green, M., A., and Heiser, G., "Decreased emitter sheet resistivity loss in highefficiency silicon solar cells," Progress in Photovoltaics: Research and Applications 2(1), 3-17 (1994).
20. Rodofili, A., "Charakterisierung der Dotierung mittels Laser Chemical Processing (LCP)," Diploma Thesis, Albert-Ludwigs- Universität: Freiburg, (2009).
21. Yang, K., H., "An etch for delineation of defects in silicon," Journal of the Electrochemical Society 131(5), 1140-1145 (1984).
22. Zhao, J., Wang, A., and Green, M., A., "24% efficient PERL structure silicon solar cells," Proceedings of the 21st IEEE Photovoltaic Specialists Conference, Kissimmee, Florida, USA, 333-5 (1990). (Pubitemid 21646591)
23. Aberle, A., G., Altermatt, P., P., Heiser, G., Robinson, S., J., Wang, A., Zhao, J., Krumbein, U., and Green, M., A., "Limiting loss mechanisms in 23% efficient silicon solar cells," Journal of Applied Physics 77(7), 3491-3504 (1995).
24. Rodofili, A., Fell, A., Hopman, S., Mayer, K., Willeke, G., P., Kray, D., and Glunz, S.W., "Local p-type back surface fields via laser chemical processing (LCP): first experiments," Proceedings of the 23rd European Photovoltaic Solar Energy Conference, Valencia, Spain, 1808-11 (2008).
25. Hopman, S., Fell, A., Mayer, K., Mesec, M., Rodofili, A., and Kray, D., "Comparison of Laser Chemical Processing and LaserMicroJet for structuring and cutting silicon substrates," Applied Physics A 95, 857-866 (2009).
26. Fell, A., Mayer, K., Hopman, S., and Kray, D., "Potential and limits of chemical enhanced deep cutting of silicon with a coupled laser-liquid jet," Journal of Laser Applications 21, 27-31 (2009).
27. Mayer, K., "Chemische Ansätze zur Neuordnung des Solarzellenprozesses ausgehend vom Wafering bis hin zur Emitterdiffusion," PhD Thesis, Johann Wolfgang Goethe - Universität: Frankfurt, (2009).