Potential and limits of chemical enhanced deep cutting of silicon with a coupled laser-liquid jet

Journal of Laser Applications

Volumn 21, Issue 1, 2009, Pages 27-31

  Fell, A ^a   Mayer, K ^a   Hopman, S ^a   Kray, D ^a  

^a FRAUNHOFER INSTITUTE FOR SOLAR ENERGY SYSTEMS ISE   (Germany)

Author keywords

Etching; Laser ablation; Laser chemical processing; Numerical simulation; Silicon; Solar cells

Indexed keywords

AUTOMOBILE SEATS; CHEMICAL COMPOUNDS; CHEMICAL INDUSTRY; CHLORINE; CHLORINE COMPOUNDS; COMPUTER SIMULATION; DISSOLUTION; ETCHING; JETS; LASER ABLATION; LASER APPLICATIONS; LASER CHEMISTRY; LASERS; LIQUIDS; MATHEMATICAL MODELS; NONMETALS; PHOTOVOLTAIC CELLS; PULSED LASER DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; SOLAR CELLS;

CARBON COMPOUNDS; CHEMICAL SYSTEMS; COUPLED LASERS; CUTTING DEPTHS; DEEP GROOVES; HEAT TRANSPORTS; IN-SITU ETCHINGS; KOH SOLUTIONS; LASER CHEMICAL ETCHINGS; LASER CHEMICAL PROCESSING; LASER IRRADIATIONS; LIQUID JETS; LIQUID MEDIAS; NEW TECHNOLOGIES; NUMERICAL MODELS; NUMERICAL SIMULATION; PHASE CHANGES; RE DEPOSITIONS; SILICON INGOTS; THERMAL PROCESS;

SILICON WAFERS;

EID: 60549083324     PISSN: 1042346X     EISSN: None     Source Type: Journal    
DOI: 10.2351/1.3071520     Document Type: Article

References (17)

1. G. P. Willeke and D. Kray, "A new route towards 50 μm thin crystalline silicon wafer solar cells," Proceedings of the 17th European Photovoltaic Solar Energy Conference (WIP, Munich, Germany, 2001), pp. 1621-1624.
2. B. Richerzhagen, Dissertation, École Polytechnique Fédérale de Lausanne, 1994, p. 102.
3. S. Baumann, D. Kray, K. Mayer, A. Ayer, and G. P. Willeke, "Comparative study of laser induced damage in silicon wafers," Proceedings of the 4th World Conference on Photovoltaic Energy Conversion, Waikoloa, Hawaii, USA (IEEE, New York, 2006), pp. 1142-1145.
4. D. Kray, A. Fell, S. Hopman, K. Mayer, M. Mesec, S. W. Glunz, and G. P. Willeke, "Progress in laser chemical processing (LCP) for innovative solar cell microstructuring and wafering applications," Proceedings of the 22nd European Photovoltaic Solar Energy Conference, Milan, Italy (WIP, Munich, 2007).
5. D. Kray, M. Schumann, A. Eyer, G. P. Willeke, R. Kübler, J. Beinert, and G. Kleer, "Solar wafer slicing with loose and fixed grains," Proceedings of the 4th World Conference on Photovoltaic Energy Conversion, Waikoloa, Hawaii, USA (IEEE, New York, 2006), pp. 948-951
6. A. Fell, S. Hopman, D. Kray, and G. P. Willeke, "Transient 3D-simulation of laser induced ablation of silicon," Proceedings of the 22nd European Photovoltaic Solar Energy Conference, Milan, Italy (WIP, Munich, 2007).
7. D. Bäuerle, Laser Processing and Chemistry, 3rd ed. (Springer, Linz, 2000), p. 788.
8. C. P. Grigoropoulos, R. H. Buckholz, and G. A. Domoto, "A heat transfer algorithm for the laser-induced melting and recrystallization of thin silicon layers," J. Appl. Phys.JAPIAU0021-897910.1063/ 1.337139 60, 2304-2309 (1986).
9. H. Seidel, Dissertation, Freie Universität Berlin, 1986, p. 142.
10. C. M. A. Ashruf, P. J. French, P. M. Sarro, P. M. M. C. Bressers, and J. J. Kelly, "Electrochemical etch stop engineering for bulk micromachining," MechatronicsMECHER0957-415810.1016/ S0957-4158(98)00017-8 8, 595-612 (1998).
11. R. J. Gutfeld and R. T. Hodgson, "Laser enhanced etching in KOH," Appl. Phys. Lett.APPLAB0003-695110.1063/1.93069 40, 352-354 (1982).
12. B. Tuck, "Review: The chemical polishing of semiconductors," J. Mater. Sci. JMTSAS0022-246110.1007/BF00540357 10, 321-339 (1975).
13. B. Schwartz and H. Robbins, "Chemical etching of silicon," J. Electrochem. Soc. JESOAN0013-465110.1149/1.2428090 108, 365-372 (1961).
14. M. Müllenborn, H. Dirac, and J. W. Petersen, "Silicon nanostructures produced by laser direct etching," Appl. Phys. Lett. APPLAB0003-695110.1063/1.114257 66, 3001-3003 (1995).
15. L. P. Hunt and E. Sirtl, "A thorough thermodynamic evaluation of the silicon-hydrogen-chlorine system," J. Electrochem. Soc. JESOAN0013-465110.1149/1.2404090 119, 1741-1745 (1972).
16. A. Spiegel and N. Vágó, "High efficiency Raman scattering in micrometer-sized water jets," Opt. Eng. OPEGAR0091-328610.1117/1.1634292 43, 450-454 (2004).
17. J. G. Riess and M. Le Blanc, "Solubility and transport phenomena in perfluorochemical relevant to blood subsitution and other biomedical applications," Pure Appl. Chem.PACHAS0033-4545 54, 2383-2384 (1982).