Nanomembrane enabled nanophotonic devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7606, Issue , 2010, Pages

  Zablocki, Mathew J ^a   Sharkawy, Ahmed S ^b   Ebil, Ozgenc ^b   Prather, Dennis W ^a  

^a UNIVERSITY OF DELAWARE   (United States)

^b EM PHOTONICS INC   (United States)

Author keywords

Flexible devices; Nanomembrane; Photonic crystal; Silicon on insulator

Indexed keywords

BULK MATERIALS; BURIED OXIDES; CRYSTALLINE SEMICONDUCTORS; FLAT SUBSTRATES; FLEXIBLE DEVICE; GAAS; NANOMATERIAL; NANOMEMBRANE; NANOMEMBRANES; NANOPHOTONIC DEVICES; OPTICAL INTERCONNECT; SI LAYER; SI WAFER; SILICON-ON-INSULATORS; SOI SUBSTRATES; TECHNOLOGICAL ADVANCEMENT;

CRYSTALLINE MATERIALS; GALLIUM ALLOYS; NANOPHOTONICS; NANOSTRUCTURES; OPTICAL INTERCONNECTS; PHOTONIC CRYSTALS; PHOTONIC DEVICES; SEMICONDUCTING SILICON; SILICON OXIDES; SILICON WAFERS; SUBSTRATES;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 77951710954     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.842670     Document Type: Conference Paper

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