Characterisation and implications of the boron rich layer resulting from open-tube liquid source BBR3 boron diffusion processes

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2009, Pages 001556-001561

  Kessler, Michael Andreas ^a   Ohrdes, Tobias ^a   Wolpensinger, Bettina ^a   Bock, Robert ^a   Harder, Nils P ^a  

^a INSTITUTE FOR SOLAR ENERGY RESEARCH HAMELIN ISFH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BORON DIFFUSIONS; BULK LIFETIME; CHARACTERISATION; DEPOSITION THICKNESS; GAS COMPOSITIONS; LIFETIME MAPPING; LIQUID SOURCES; SEM; SHEET RESISTANCE MEASUREMENTS; SILICATE GLASS;

BORON; BORON COMPOUNDS; DEGRADATION; DIFFUSION IN SOLIDS; ELECTRIC RESISTANCE; IMPACT RESISTANCE; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SHEET RESISTANCE; SILICATES; SILICON WAFERS;

CARRIER LIFETIME;

EID: 77951597420     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/PVSC.2009.5411365     Document Type: Conference Paper

References (10)

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