P-type ZnO thin films prepared by in situ oxidation of DC sputtered Zn 3N2:Ga

Journal of Semiconductors

Volumn 31, Issue 4, 2010, Pages

  Zhang, Jun ^a,b   Xue, Shuwen ^a,b   Shao, Lexi ^a,b  

^a LINGNAN NORMAL UNIVERSITY   (China)

^b Universities of Guangdong   (China)

Author keywords

Codoping; Magnetron sputtering; P type; Zn3N2 films; ZnO films

Indexed keywords

CO-DOPED; CO-DOPED ZNO; CODOPING; DC SPUTTERING; FABRICATION ROUTES; GLASS SUBSTRATES; HALL EFFECT MEASUREMENT; HIGH PURITY OXYGEN; IN-SITU OXIDATION; LOW RESISTIVITY; OPTICAL AND ELECTRICAL PROPERTIES; OPTICAL TRANSMITTANCE; OXIDATION TEMPERATURE; P TYPE ZNO; P TYPE ZNO THIN FILM; P-TYPE; P-TYPE CONDUCTION; SEM; XRD ANALYSIS; ZNO FILMS;

DEPOSITION; ELECTRIC PROPERTIES; GALLIUM; GALLIUM ALLOYS; GYRATORS; HALL MOBILITY; HOLE CONCENTRATION; METALLIC FILMS; OPTICAL FILMS; OPTICAL PROPERTIES; OXIDATION; OXYGEN; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; ZINC; ZINC OXIDE;

GALVANOMAGNETIC EFFECTS;

EID: 77951582488     PISSN: 16744926     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-4926/31/4/043001     Document Type: Article

References (12)

1. Tang Z K, Wong G K L, Yu P 1998 Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystallite thin films Appl Phys Lett 72 3270 (Pubitemid 128673625)
2. Dzieck E P, Kamiska E, Pasternak I, et al 2007 Photoluminescence study of p-type ZnO:Sb prepared by thermal oxidation of the Zn-Sb starting material Phys Rev B 76 193303
3. Futsuhara M, Yoshioka K, Takai O 1998 Structural, electrical and optical properties of zinc nitride thin films prepared by reactive RF magnetron sputtering Thin Solid Films 322 274 (Pubitemid 128422684)
4. Bian J M, Li X M, Zhang C Y, et al 2004 P-type ZnO films by monodoping of nitrogen and ZnO-based p-n homojunctions Appl Phys Lett 85 4070
5. Ji Z, Yang C, Liu K, et al 2003 Fabrication and characterization of p-type ZnO films by pyrolysis of zinc-acetate-ammonia solution J. Cryst Growth 253 239
6. Ye Z Z, Lu J G, Chen H H, et al 2003 Preparation and characteristics of p-type ZnO films by DC reactive magnetron sputtering J. Cryst Growth 253 258
7. Look D C, Reynolds D C, Litton C W, et al 2002 Characterization of homoepitaxial p-type ZnO grown by molecular beam epitaxy Appl Phys Lett 81 1830
8. 2 Solid State Commun 135 11
9. Guo X L, Tabata H, Kawai T 2001 Pulsed laser reactive deposition of p-type ZnO film enhanced by an electron cyclotron resonance source J. Cryst Growth 223 135 (Pubitemid 32874632)
10. Kambilafka V, Voulgaropoulou P, Dounis S, et al 2007 The effect of nitrogen on the properties of zinc nitride thin films and their conversion into p-ZnO:N films Thin Solid Films 515 8573
11. 2 thin films deposited by DC magnetron sputtering J. Cryst Growth 259 279
12. Janotti A, van de Walle C G 2009 Fundamentals of zinc oxide as a semiconductor Rep Prog Phys 72 126501