Simulation of a full 300mm semiconductor manufacturing plant with material handling constraints

Proceedings - Winter Simulation Conference

Volumn , Issue , 2009, Pages 1601-1609

  Kiba, Jean Etienne ^a   Lamiable, Gilles ^a   Dauzère Pérès, Stéphane ^b   Yugma, Claude ^b  

^a STMICROELECTRONICS   (France)

^b ECOLE DES MINES DE SAINT ETIENNE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

300 MM SEMICONDUCTOR MANUFACTURING; AUTOMATED MATERIAL HANDLING SYSTEMS; DETAILED MODELS; MATERIAL HANDLING; MODEL SIMULATION; PRODUCTION SYSTEM; SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR PLANTS; SIMULATION MODEL;

MATERIALS HANDLING; MATERIALS HANDLING EQUIPMENT; SEMICONDUCTOR DEVICE MANUFACTURE;

INDUSTRIAL APPLICATIONS;

EID: 77951541130     PISSN: 08917736     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/WSC.2009.5429267     Document Type: Conference Paper

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