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Volumn 7590, Issue , 2010, Pages

Alternative technology for fabrication of nano- or microstructured mould inserts used for optical components

Author keywords

DPW; Electroforming; Hot embossing; Injection moulding; Joining technology; LIGA; Mass fabrication; Mould insert; Moulding; Multiscale components

Indexed keywords

HOT-EMBOSSING; INJECTION MOULDING; JOINING TECHNOLOGY; LIGA; MASS FABRICATION; MULTISCALE COMPONENTS;

EID: 77951523644     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.841894     Document Type: Conference Paper
Times cited : (4)

References (19)
  • 1
    • 0022717983 scopus 로고
    • FABRICATION of MICROSTRUCTURES with HIGH ASPECT RATIOS and GREAT STRUCTURAL HEIGHTS by SYNCHROTRON RADIATION LITHOGRAPHY, GALVANOFORMING, and PLASTIC MOULDING (LIGA PROCESS)
    • DOI 10.1016/0167-9317(86)90004-3
    • Becker, E.W.; Ehrfeld, W.; Hagmann, P.; Maner, A.; Muenchmeyer, D., "Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)", Microelectronic Engineering, 4 (1986) pp. 35-56. (Pubitemid 16587242)
    • (1986) Microelectronic Engineering , vol.4 , Issue.1 , pp. 35-56
    • Becker, E.W.1    Ehrfeld, W.2    Hagmann, P.3    Maner, A.4    Muenchmeyer, D.5
  • 2
    • 85017555407 scopus 로고    scopus 로고
    • Microelectroforming of metals
    • Automation and Properties Weinheim [u.a.]: Wiley-VCH, Advanced Micro and Nanosystems ; ISBN 3-527-31493-8
    • Schanz, G.; Bade, K., "Microelectroforming of metals". Microengineering of Metals and Ceramics Part II: Special Replication Techniques, Automation and Properties Weinheim [u.a.]: Wiley-VCH, 2005 pp. 395-420 (Advanced Micro and Nanosystems ; Vol.4) ISBN 3-527-31493-8.
    • (2005) Microengineering of Metals and Ceramics Part II: Special Replication Techniques , vol.4 , pp. 395-420
    • Schanz, G.1    Bade, K.2
  • 3
    • 0041807953 scopus 로고    scopus 로고
    • Mikroabformung in Kunststoff - Von der Machbarkeitsstudie zur Vorserienfertigung
    • Piotter, V.; Hanemann, T.; Heckele, M., "Mikroabformung in Kunststoff - von der Machbarkeitsstudie zur Vorserienfertigung". Galvanotechnik, 94 (2003) pp. 1738-1745.
    • (2003) Galvanotechnik , vol.94 , pp. 1738-1745
    • Piotter, V.1    Hanemann, T.2    Heckele, M.3
  • 7
    • 33750238409 scopus 로고    scopus 로고
    • Galvanische Replikation von Kunststoff-Mikrostrukturen als alternatives Verfahren für die Fertigung von Abformwerkzeugen
    • Guttmann, M.; Mehne, C.; Heckele, M.; Wissmann, M.; Hartmann, M., "Galvanische Replikation von Kunststoff-Mikrostrukturen als alternatives Verfahren für die Fertigung von Abformwerkzeugen", Galvanotechnik 97 (2006) pp. 2530-2536.
    • (2006) Galvanotechnik , vol.97 , pp. 2530-2536
    • Guttmann, M.1    Mehne, C.2    Heckele, M.3    Wissmann, M.4    Hartmann, M.5
  • 8
    • 77951594434 scopus 로고    scopus 로고
    • Fertigung von Formeinsätzen über die galvanische Replikation von polymeren Mikrobauteilen
    • Wissmann, M.; Guttmann, M.; Hartmann, M.; Manegold, S.; Matthis, B.; Heckele, M., "Fertigung von Formeinsätzen über die galvanische Replikation von polymeren Mikrobauteilen", GMM-Fachbericht Vol. 53 (2007) pp. 49-53,
    • (2007) GMM-Fachbericht , vol.53 , pp. 49-53
    • Wissmann, M.1    Guttmann, M.2    Hartmann, M.3    Manegold, S.4    Matthis, B.5    Heckele, M.6
  • 9
    • 77951587292 scopus 로고    scopus 로고
    • Technologien und Werkstoffe der Mikro- Und Nanosystemtechnik
    • Karlsruhe, VDE Verlag GMBH · Berlin · Offenbach, ISBN 978-3-8007-3033-9
    • Technologien und Werkstoffe der Mikro- und Nanosystemtechnik, GMM-Workshop 7./8. Mai 2007, Karlsruhe, VDE Verlag GMBH · Berlin · Offenbach, ISBN 978-3-8007-3033-9.
    • GMM-Workshop 7./8. Mai 2007
  • 11
    • 77951549671 scopus 로고    scopus 로고
    • Replication of refractive and diffractive micro opto-mechanical components via vacuum casting and hot embossing
    • Chapter
    • Tuteleers, P. et al., "Replication of refractive and diffractive micro opto-mechanical components via vacuum casting and hot embossing", Proceedings Symposium IEEE/LEOS Benelux, Amsterdam, (2002) Chapter 274-277.
    • Proceedings Symposium IEEE/LEOS Benelux, Amsterdam, (2002) , pp. 274-277
    • Tuteleers, P.1
  • 12
    • 45149111160 scopus 로고    scopus 로고
    • Discrete out-of-plane coupling components for Printed Circuit Board-level optical interconnections
    • Van Erps, J.; Hendrickx, N.; Debaes, C.; Van Daele, P.; Thienpont, H., "Discrete out-of-plane coupling components for Printed Circuit Board-level optical interconnections", IEEE Photonics Technology Letters, Vol.19 (2007) pp. 1753-1755.
    • (2007) IEEE Photonics Technology Letters , vol.19 , pp. 1753-1755
    • Van Erps, J.1    Hendrickx, N.2    Debaes, C.3    Van Daele, P.4    Thienpont, H.5
  • 13
    • 33746756015 scopus 로고    scopus 로고
    • Design, modeling, and prototyping of microinterometric tomography system for optical fiber inspection
    • Krajewski, R.; Volckaerts, B.; Meuret, Y.; Kujawinska, M.; Thienpont, H., "Design, modeling, and prototyping of microinterometric tomography system for optical fiber inspection", Proc. SPIE, Vol.6188, (2006).
    • (2006) Proc. SPIE , vol.6188
    • Krajewski, R.1    Volckaerts, B.2    Meuret, Y.3    Kujawinska, M.4    Thienpont, H.5
  • 18
    • 84994424780 scopus 로고    scopus 로고
    • Lithographic Fabrication of Mold Inserts
    • edited by H. Baltes, O. Brand, G.K. Fedder, C. Hierold, J.G. Korvink, O. Tabata, Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim
    • Guttmann, M.; Schulz, J.; Saile, V.: "Lithographic Fabrication of Mold Inserts" in "Advanced Micro and Nanosystems", Vol.3, Microengineering of Metals and Ceramics, edited by H. Baltes, O. Brand, G.K. Fedder, C. Hierold, J.G. Korvink, O. Tabata, Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, (2005) 187-219.
    • (2005) Advanced Micro and Nanosystems , vol.3 , pp. 187-219
    • Guttmann, M.1    Schulz, J.2    Saile, V.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.