-
1
-
-
0022717983
-
FABRICATION of MICROSTRUCTURES with HIGH ASPECT RATIOS and GREAT STRUCTURAL HEIGHTS by SYNCHROTRON RADIATION LITHOGRAPHY, GALVANOFORMING, and PLASTIC MOULDING (LIGA PROCESS)
-
DOI 10.1016/0167-9317(86)90004-3
-
Becker, E.W.; Ehrfeld, W.; Hagmann, P.; Maner, A.; Muenchmeyer, D., "Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)", Microelectronic Engineering, 4 (1986) pp. 35-56. (Pubitemid 16587242)
-
(1986)
Microelectronic Engineering
, vol.4
, Issue.1
, pp. 35-56
-
-
Becker, E.W.1
Ehrfeld, W.2
Hagmann, P.3
Maner, A.4
Muenchmeyer, D.5
-
2
-
-
85017555407
-
Microelectroforming of metals
-
Automation and Properties Weinheim [u.a.]: Wiley-VCH, Advanced Micro and Nanosystems ; ISBN 3-527-31493-8
-
Schanz, G.; Bade, K., "Microelectroforming of metals". Microengineering of Metals and Ceramics Part II: Special Replication Techniques, Automation and Properties Weinheim [u.a.]: Wiley-VCH, 2005 pp. 395-420 (Advanced Micro and Nanosystems ; Vol.4) ISBN 3-527-31493-8.
-
(2005)
Microengineering of Metals and Ceramics Part II: Special Replication Techniques
, vol.4
, pp. 395-420
-
-
Schanz, G.1
Bade, K.2
-
3
-
-
0041807953
-
Mikroabformung in Kunststoff - Von der Machbarkeitsstudie zur Vorserienfertigung
-
Piotter, V.; Hanemann, T.; Heckele, M., "Mikroabformung in Kunststoff - von der Machbarkeitsstudie zur Vorserienfertigung". Galvanotechnik, 94 (2003) pp. 1738-1745.
-
(2003)
Galvanotechnik
, vol.94
, pp. 1738-1745
-
-
Piotter, V.1
Hanemann, T.2
Heckele, M.3
-
5
-
-
0000654715
-
Deep lithography with protons: A generic fabrication technology for refractive micro-optical components and modules
-
Volckaerts, B.; Ottevaere, H.; Vynck, P.; Debaes, C. ; Tuteleers, P.; Hermanne, A.; Veretennicoff, I.; Thienpont, H., "Deep lithography with protons: A generic fabrication technology for refractive micro-optical components and modules", Asian J. Phys. 10 (2001) pp. 195-214. (Pubitemid 36325599)
-
(2001)
ASIAN JOURNAL of PHYSICS
, vol.10
, Issue.2
, pp. 195-214
-
-
Volckaerts, B.1
Ottevaere, H.2
Vynck, P.3
Debaes, C.4
Tuteleers, P.5
Hermanne, A.6
Veretennicoff, I.7
Thienpont, H.8
-
6
-
-
33746685082
-
High-efficiency diffraction grating coupler for multimode optical interconnect
-
Franc, J.; Destouches, N.; Blanc, D.; Pommier, J.-C.; Tonchev, S.; Van Steenberge, G.; Hendrickx, N.; Last, A.; Parriaux, O., "High-efficiency diffraction grating coupler for multimode optical interconnect", Proc. SPIE 6185 (2006) pp. 435-441.
-
(2006)
Proc. SPIE
, vol.6185
, pp. 435-441
-
-
Franc, J.1
Destouches, N.2
Blanc, D.3
Pommier, J.-C.4
Tonchev, S.5
Van Steenberge, G.6
Hendrickx, N.7
Last, A.8
Parriaux, O.9
-
7
-
-
33750238409
-
Galvanische Replikation von Kunststoff-Mikrostrukturen als alternatives Verfahren für die Fertigung von Abformwerkzeugen
-
Guttmann, M.; Mehne, C.; Heckele, M.; Wissmann, M.; Hartmann, M., "Galvanische Replikation von Kunststoff-Mikrostrukturen als alternatives Verfahren für die Fertigung von Abformwerkzeugen", Galvanotechnik 97 (2006) pp. 2530-2536.
-
(2006)
Galvanotechnik
, vol.97
, pp. 2530-2536
-
-
Guttmann, M.1
Mehne, C.2
Heckele, M.3
Wissmann, M.4
Hartmann, M.5
-
8
-
-
77951594434
-
Fertigung von Formeinsätzen über die galvanische Replikation von polymeren Mikrobauteilen
-
Wissmann, M.; Guttmann, M.; Hartmann, M.; Manegold, S.; Matthis, B.; Heckele, M., "Fertigung von Formeinsätzen über die galvanische Replikation von polymeren Mikrobauteilen", GMM-Fachbericht Vol. 53 (2007) pp. 49-53,
-
(2007)
GMM-Fachbericht
, vol.53
, pp. 49-53
-
-
Wissmann, M.1
Guttmann, M.2
Hartmann, M.3
Manegold, S.4
Matthis, B.5
Heckele, M.6
-
9
-
-
77951587292
-
Technologien und Werkstoffe der Mikro- Und Nanosystemtechnik
-
Karlsruhe, VDE Verlag GMBH · Berlin · Offenbach, ISBN 978-3-8007-3033-9
-
Technologien und Werkstoffe der Mikro- und Nanosystemtechnik, GMM-Workshop 7./8. Mai 2007, Karlsruhe, VDE Verlag GMBH · Berlin · Offenbach, ISBN 978-3-8007-3033-9.
-
GMM-Workshop 7./8. Mai 2007
-
-
-
10
-
-
33751059205
-
Deep proton writing: A rapid prototyping polymer micro-fabrication tool for micro-optical modules
-
DOI 10.1088/1367-2630/8/11/270, PII S1367263006319027
-
Debaes, C.; Van Erps, J.; Vervaeke, M.; Volckaerts, B.; Ottevaere, H.; Gomez, V.; Vynck, P.; Desmet, L.; Krajewski, R.; Ishii, Y.; Hermanne, A.; Thienpont, H., "Deep proton writing: a rapid prototyping polymer micro-fabrication tool for micro-optical modules", New Journal of Physics, 8 (2006) pp. 270-288. (Pubitemid 44759880)
-
(2006)
New Journal of Physics
, vol.8
, pp. 270
-
-
Debaes, C.1
Van Erps, J.2
Vervaeke, M.3
Volckaerts, B.4
Ottevaere, H.5
Gomez, V.6
Vynck, P.7
Desmet, L.8
Krajewski, R.9
Ishii, Y.10
Hermanne, A.11
Thienpont, H.12
-
11
-
-
77951549671
-
Replication of refractive and diffractive micro opto-mechanical components via vacuum casting and hot embossing
-
Chapter
-
Tuteleers, P. et al., "Replication of refractive and diffractive micro opto-mechanical components via vacuum casting and hot embossing", Proceedings Symposium IEEE/LEOS Benelux, Amsterdam, (2002) Chapter 274-277.
-
Proceedings Symposium IEEE/LEOS Benelux, Amsterdam, (2002)
, pp. 274-277
-
-
Tuteleers, P.1
-
12
-
-
45149111160
-
Discrete out-of-plane coupling components for Printed Circuit Board-level optical interconnections
-
Van Erps, J.; Hendrickx, N.; Debaes, C.; Van Daele, P.; Thienpont, H., "Discrete out-of-plane coupling components for Printed Circuit Board-level optical interconnections", IEEE Photonics Technology Letters, Vol.19 (2007) pp. 1753-1755.
-
(2007)
IEEE Photonics Technology Letters
, vol.19
, pp. 1753-1755
-
-
Van Erps, J.1
Hendrickx, N.2
Debaes, C.3
Van Daele, P.4
Thienpont, H.5
-
13
-
-
33746756015
-
Design, modeling, and prototyping of microinterometric tomography system for optical fiber inspection
-
Krajewski, R.; Volckaerts, B.; Meuret, Y.; Kujawinska, M.; Thienpont, H., "Design, modeling, and prototyping of microinterometric tomography system for optical fiber inspection", Proc. SPIE, Vol.6188, (2006).
-
(2006)
Proc. SPIE
, vol.6188
-
-
Krajewski, R.1
Volckaerts, B.2
Meuret, Y.3
Kujawinska, M.4
Thienpont, H.5
-
14
-
-
45149129748
-
Replication of deep micro-optical components prototyped by Deep Proton Writing
-
Strasbourg, April Paper-No. 6992-7008
-
Van Erps, J.; Desmet, L.; Guttmann, M.; Wissmann, M.; Debaes, C.; Hartmann, M.; Thienpont, H., "Replication of deep micro-optical components prototyped by Deep Proton Writing", SPIE Photonics Europe, Strasbourg, April 2008, Paper-No. 6992-7008
-
(2008)
SPIE Photonics Europe
-
-
Van Erps, J.1
Desmet, L.2
Guttmann, M.3
Wissmann, M.4
Debaes, C.5
Hartmann, M.6
Thienpont, H.7
-
15
-
-
45149118954
-
Characterization of high aspect ratio optical structures replicated with hot embossing
-
Krajewski, R.; Kujawinska, M.; Van Erps, J.; Mohr, J., "Characterization of high aspect ratio optical structures replicated with hot embossing", General Scientific Networking Meeting of the Network of Excellence on Micro-Optics (NEMO), Florence, May 2007.
-
General Scientific Networking Meeting of the Network of Excellence on Micro-Optics (NEMO), Florence, May 2007
-
-
Krajewski, R.1
Kujawinska, M.2
Van Erps, J.3
Mohr, J.4
-
16
-
-
77949293664
-
A new wireless and miniaturized high-resolution optical displacement sensor
-
Artikel 61881B
-
Guttmann, M.; Last, A.; Yourlin, Y.; Parriaux, O.; Reynaud, S.; Pommier, J. C.; Johnson, M.: "A new wireless and miniaturized high-resolution optical displacement sensor", Proc. SPIE; Vol.6188; Artikel 61881B.
-
Proc. SPIE
, vol.6188
-
-
Guttmann, M.1
Last, A.2
Yourlin, Y.3
Parriaux, O.4
Reynaud, S.5
Pommier, J.C.6
Johnson, M.7
-
17
-
-
33646013281
-
Laser patterning and welding of transparent polymers for microfluidic device fabrication
-
Bachmann, F.G. [Hrsg.] Bellingham, Wash.: SPIE; S.610705/1-12
-
Pfleging, W.; Baldus, O.: "Laser patterning and welding of transparent polymers for microfluidic device fabrication", Bachmann, F.G. [Hrsg.] Laser-based Micropackaging: Proc. of Photonics West: Lasers and Applications in Science and Technology, San Jose, Calif., January 21-26, 2006 Bellingham, Wash.: SPIE; Vol.6107; S.610705/1-12.
-
Laser-based Micropackaging: Proc. of Photonics West: Lasers and Applications in Science and Technology, San Jose, Calif., January 21-26, 2006
, vol.6107
-
-
Pfleging, W.1
Baldus, O.2
-
18
-
-
84994424780
-
Lithographic Fabrication of Mold Inserts
-
edited by H. Baltes, O. Brand, G.K. Fedder, C. Hierold, J.G. Korvink, O. Tabata, Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim
-
Guttmann, M.; Schulz, J.; Saile, V.: "Lithographic Fabrication of Mold Inserts" in "Advanced Micro and Nanosystems", Vol.3, Microengineering of Metals and Ceramics, edited by H. Baltes, O. Brand, G.K. Fedder, C. Hierold, J.G. Korvink, O. Tabata, Wiley-VCH Verlag GmbH & Co. KGaA, Weinheim, (2005) 187-219.
-
(2005)
Advanced Micro and Nanosystems
, vol.3
, pp. 187-219
-
-
Guttmann, M.1
Schulz, J.2
Saile, V.3
-
19
-
-
54049099417
-
Hot embossing of microoptical components prototyped by deep proton writing
-
Van Erps, J.; Wissmann, M.; Guttmann, M.; Hartmann, M.; Mohr, J.; Debaes, C.; Thienpont, H.: "Hot embossing of microoptical components prototyped by deep proton writing", IEEE Photonics Technology Letters, 20 (2008) pp. 1539-1541
-
(2008)
IEEE Photonics Technology Letters
, vol.20
, pp. 1539-1541
-
-
Van Erps, J.1
Wissmann, M.2
Guttmann, M.3
Hartmann, M.4
Mohr, J.5
Debaes, C.6
Thienpont, H.7
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