Development of micro-diamond tools through electroless composite plating and investigation into micro-machining characteristics

Precision Engineering

Volumn 34, Issue 3, 2010, Pages 376-386

  Park, Heung Kil ^a   Onikura, Hiromichi ^a   Ohnishi, Osamu ^a   Sharifuddin, Ahmad ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b TOKYO ELECTRON LTD   (Japan)

Author keywords

Electroless plating; Micro channel device; Micro diamond tool; Micro grooving; Micro machining; Silicon

Indexed keywords

CEMENTED CARBIDES; COMPOSITE PLATING; CYLINDRICAL SHAPES; DIAMOND GRITS; DIAMOND SIZE; DIAMOND TOOL; ELECTROLESS COMPOSITE PLATING; ELECTROLESS NI-P; FABRICATION PROCESS; FEED-RATES; GRINDING SPEED; GROOVE DEPTH; MICRO-CHANNEL DEVICES; MICRO-GROOVING; MICRO-TOOL; MICROTOOLS; PLATING PARAMETERS; ROTATION SPEED; SINGLE CRYSTALLINE SILICON; SOLUTION STIRRING; SUBSTRATE MATERIAL; TOOL LIFE;

CARBIDES; DIAMOND CUTTING TOOLS; ELECTROLESS PLATING; FABRICATION; MICROMACHINING;

DIAMONDS;

EID: 77951298243     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2009.09.001     Document Type: Article

References (12)

1. Gäbler J., Schäfer L., and Westermann H. Chemical vapour deposition diamond coated micro tools for grinding, milling and drilling. Diamond and Related Materials 9 (2000) 921-924
2. Lee D.G., Lee H.G., Kim P.J., and Bang K.G. Micro-drilling of alumina green bodies with diamond grit abrasive micro-drills. International Journal of Machine Tools & Manufacture 43 (2003) 551-558
3. Lee H.G., and Lee D.G. Tool life model for abrasive wet micro-drilling of ceramic green bodies. International Journal of Machine Tools & Manufacture 44 (2004) 839-846
4. 3, Diamond) coating layers. Journal of the Korean Institute of Surface Engineering 27 (1994) 193-206 [in Korean]
5. Winowlin Jappes J.T., Ramamoorthy B., and Nair K.P. A study on the influence of process parameters on efficiency and crystallinity of electroless Ni-P deposits. The Journal of Materials Processing Technology 169 (2005) 308-313
6. Baskaran I., Sankara Narayanan T.S.N., and Stephen A. Effect of accelerators and stabilizers on the formation and characteristics of electroless Ni-P deposits. Materials Chemistry and Physics 99 (2006) 117-126
7. Cheong W.J., Luan B.L., and Shoesmith D.W. The effects of stabilizers on the bath stability of electroless Ni deposition and the deposit. Applied Surface Science 229 (2004) 282-300
8. Park H.-K., Onikura H., Ohnishi O., and Sharifuddin A. Fabrication of micro diamond tools by electroless composite plating and micro grinding. Proceedings of the International Conference on The 4th Leading Edge Manufacturing in 21st Century (2007) 207-210
9. Iwamatsu K. Electroless Composite Plating. Top Techno Focus (1991), OKUNO Chemical Industries Co., Ltd. No. 7, pp. 5-13 (in Japanese)
10. Reyes D., Iossifidis R., Auroux D., Manz P.A., and Micro A. Total Analysis Systems: 1. Introduction, theory, and technology. Analytical Chemistry 74 (2002) 2623-2636
11. Ivanov P., Blanco F., Gràcia I., Sabaté N., Ruiz A., Vilanova X., et al. Improvement of the gas sensor response via silicon μ-preconcentrator. Sensors and Actuators B 127 (2007) 288-294
12. Lie Y.M., Ke J.H., Chang W.R., Cheng T.C., and Lin T.F. Saturated flow boiling heat transfer and associated bubble characteristics of FC-72 on a heated micro-pin-finned silicon chip. International Journal of Heat and Mass Transfer 50 (2007) 3862-3876