Fabricating microelectrode by electrochemical micromachining

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6041, Issue , 2005, Pages

  Wang, Zhenlong ^a   Zhu, Baoguo ^a   Cao, Guohui ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Electrochemical machining (ECM); Electrochemical micromachining (EMM); Microelectrode

Indexed keywords

ELECTRIC DISCHARGE MACHINING; ELECTROCHEMISTRY; FABRICATION; MICROMACHINING; MICROSCOPIC EXAMINATION;

ELECTROCHEMICAL MACHINING (ECM); ELECTROCHEMICAL MICROMACHINING (EMM);

MICROELECTRODES;

EID: 33645009661     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.664344     Document Type: Conference Paper

References (7)

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