A micromachined silicon capacitive temperature sensor for radiosonde applications

Proceedings of IEEE Sensors

Volumn , Issue , 2009, Pages 1693-1696

  Ma, Hong Yu ^a   Huang, Qing An ^a   Qin, Ming ^a   Lu, Tingting ^a  

^a Southeast University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

LOW POWER; LOW-POWER DISSIPATION; MASK PROCESS; MICROMACHINED; MICROMACHINED SILICON; MULTI-LAYERED; SENSOR STRUCTURES; SOI WAFERS; TEMPERATURE RANGE;

TEMPERATURE SENSORS;

SILICON WAFERS;

EID: 77951140182     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2009.5398513     Document Type: Conference Paper

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