Experimental study on the dielectric-deformation behavior of SIO 2 in a sandwich structure

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 455-458

  Huang, Jian Qiu ^a   Huang, Xiao Dong ^a   Huang, Qing An ^a   Qin, Ming ^a  

^a Southeast University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; REACTIVE ION ETCHING; SILICON COMPOUNDS;

DEFORMATION BEHAVIORS; EXPERIMENTAL STUDIES; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS;

DEFORMATION;

EID: 50149084500     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443691     Document Type: Conference Paper

References (7)

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7. S.P. Timoshenko and S.W. Krieger, Theory of Plates and Shells, McGraw-Hill Inc., New York, 1970.