Differential platinum thin film hydrogen gas sensor fabricated by MEMS techniques

IEEJ Transactions on Sensors and Micromachines

Volumn 130, Issue 3, 2010, Pages 65-68

  Yamazaki, Daisuke ^a   Ueda, Toshitsugu ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

Hydrogen gas sensor; Lift off process; MEMS; Platinum thin film

Indexed keywords

CHEMICAL SENSORS; FABRICATION; GAS DETECTORS; GASES; HEAT TRANSFER; HYDROGEN; MEMS; PLATINUM; RESISTORS;

FABRICATION TECHNIQUE; HYDROGEN GAS SENSORS; LIFT-OFF PROCESS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); PLATINUM THIN FILM; TEMPERATURE RESISTANCES; THERMO-RESISTIVE; THIN FILM SENSORS;

THIN FILMS;

EID: 77950992660     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.130.65     Document Type: Article

References (10)

1. D. Yamazaki, L. Zhang, J. Pawlat, and T. Ueda : "Thermo-resistive Platinum Thin Film Hydrogen Gas Sensor Fabricated by MEMS Techniques", IEEJ Trans. SM, Vol.128, No.9, pp.347-351 (2008-2009)
2. Th Sensor Symposium, pp.288-291 (2007)
3. K. Yamanaka, S. Ishikawa, N. Nakaso, and N. Takeda : "Ball SAW device for hydrogen gas sensor", Ultrasonics Symposium, IEEE (2003)
4. M. Nishibori, W. Shin, L. F. Houlet, K. Tajima, T. Itoh, N. Izu, N. Murayama, and I. Matsubara : "New structural design of micro-thermoelectric sensor for wide range hydrogn detection", Journal of Ceramic Society of Japan, Vol.144, No.10, pp.853-856 (2006)
5. W. Shin, M. Matsumiya, F. Qiu, N. Izu, and N. Murayama : "Thermmoelectric gas sensor for detection of high hydrogen concentration", Sensors and Actuators, VoLB 97, pp.344-347 (2004)
6. H. Ikeda, J. Sato, and F. A. Williams : "Surface kinetics for hydrogen-air mixtures on platinum at atmosperic pressure in stagnation flows". Surface science, Vol.326, pp.11-26 (1995)
7. M. Matsumiya, W. Shin, N. Izu, and N. Murayama : "Nano-structured thin-film Pt catalyst for thermoelectric hydrogen gas sensor", Sensors and Actuators, Vol.B 93, pp.309-315 (2003)
8. L.-G. Petersson and U. Ackelid : "Kinetic studies of diffusion limited gas-surface reactions by spatially resolved gas samling: reaction rates and sticking coefficients in the H2+O2 reaction on Pt", Surface science, 269/270, pp.500-505 (1992)
9. S. J. Gentry and T. A. Jones : "The role of catalysis in solid-states gas sensors", Sensors and Actuators, Vol.10, pp. 141-163 (1986)
10. U. Ackelid, J. Fogelbsrg, and L.-G. Petersson : "Local gas sampling and surface hydrogen detection in catalysis on planar surfaces", Vacuum, Vol.42, pp.889-895 (1991)