Thermo-resistive platinum thin film hydrogen gas sensor fabricated by MEMS techniques

IEEJ Transactions on Sensors and Micromachines

Volumn 128, Issue 9, 2008, Pages 347-351

  Yamazaki, Daisuke ^a   Zhang, Lin ^a   Pawlat, Joanna ^a   Ueda, Toshitsugu ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

Hydrogen gas sensor; Lift off process; MEMS; Platinum thin film

Indexed keywords

CATALYSIS; CHEMICAL SENSORS; FABRICATION; GAS DETECTORS; GASES; HYDROGEN; MEMS; PLATINUM; RESISTORS;

CATALYTIC REACTIONS; EXTERNAL ENVIRONMENTS; FABRICATION TECHNIQUE; HYDROGEN GAS SENSORS; LIFT-OFF PROCESS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); PLATINUM THIN FILM; TEMPERATURE RESISTANCES;

THIN FILMS;

EID: 73849115330     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.128.347     Document Type: Article

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