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Volumn 114, Issue 1334, 2006, Pages 853-856
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New structural design of micro-thermoelectric sensor for wide range hydrogen detection
a a a a a a a a |
Author keywords
Ceramic catalyst; Hydrogen sensor; SiGe; Thermoelectric; Wide range
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Indexed keywords
ALUMINA;
CERAMIC MATERIALS;
HYDROGEN;
MICROSENSORS;
PLATINUM;
SEMICONDUCTING GERMANIUM COMPOUNDS;
SEMICONDUCTING SILICON COMPOUNDS;
THIN FILMS;
CERAMIC CATALYSTS;
MICRO-THERMOELECTRIC SENSORS;
SIGE;
THERMOELECTRIC HYDROGEN SENSOR (THS);
CHEMICAL SENSORS;
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EID: 33749409482
PISSN: 09145400
EISSN: 13486535
Source Type: Journal
DOI: 10.2109/jcersj.114.853 Document Type: Article |
Times cited : (42)
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References (14)
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