Fabrication of micro DOE using micro tools shaped with focused ion beam

Optics Express

Volumn 18, Issue 8, 2010, Pages 8025-8032

  Xu, Z W ^a,b   Fang, F Z ^a,b   Zhang, S J ^a   Zhang, X D ^a,b   Hu, X T ^a   Fu, Y Q ^c   Li, L ^d  

^a TIANJIN UNIVERSITY   (China)

^b Tianjin MicroNano Manufacturing Tech Co Ltd   (China)

^c UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

^d UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CUTTING TOOLS; FOCUSED ION BEAMS;

COMPLICATED SHAPE; FOCUSED ION BEAM MILLING; HIGH EFFICIENT; MICRO-CUTTING TOOLS; NANO-METRIC CUTTINGS; NANO-SCALE SURFACES; SINUSOIDAL MODULATION; TOOL EDGE RADIUS;

ION BEAMS;

EID: 77950893029     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.18.008025     Document Type: Article

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