Microscopic Grinding Effects on Fabrication of Ultra-fine Micro Tools

CIRP Annals - Manufacturing Technology

Volumn 56, Issue 1, 2007, Pages 569-572

  Ohmori, H ^a   Katahira, K ^a   Naruse, T ^a   Uehara, Y ^a   Nakao, A ^a   Mizutani, M ^a  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

Author keywords

Grinding; Micro tool; Surface quality

Indexed keywords

ABRASION; DIFFUSION; FRACTURE; NANOINDENTATION; OXIDATION; X RAY PHOTOELECTRON SPECTROSCOPY;

MICRO-TOOLS; OXYGEN ATOMS; SURFACE CHEMICAL PROPERTIES;

GRINDING WHEELS;

EID: 34250183842     PISSN: 00078506     EISSN: 17260604     Source Type: Journal    
DOI: 10.1016/j.cirp.2007.05.136     Document Type: Article

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