Micromachined silicon electrolytic conductivity probes with integrated temperature sensor

IEEE Sensors Journal

Volumn 5, Issue 6, 2005, Pages 1185-1196

  He, Dongming ^a   Shannon, Mark A ^b,c,d,e   Miller, Norman R ^b  

^a INTEL CORPORATION   (United States)

^b University of Illinois at Urbana Champaign   (United States)

^c UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^d UIUC   (United States)

^e Beckman Institute of Advanced Science and Engineering   (United States)

Author keywords

Deep reactive ion etching (DRIE); Double layer; Electrode impedance; Electrolytic conductivity; Four electrode measurement; Micromachining; Platinum black; Resistive temperature device (RTD)

Indexed keywords

DOUBLE LAYER; ELECTRODE IMPEDANCE; FOUR-ELECTRODE MEASUREMENT;

ELECTRIC CONDUCTIVITY; ELECTRIC IMPEDANCE; MICROELECTRODES; MICROMACHINING; PROBES; REACTIVE ION ETCHING; SILICON;

MICROSENSORS;

EID: 29044442771     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2005.855596     Document Type: Article

References (10)

1. W. Olthuis, A. Volanschi, J. G. Bomer, and P. Bergveld, "A new probe for measuring electrolytic conductance," Sens. Actuators B, Chem., vol. 13-14, pp. 230-233, 1993.
2. N. Kordas, Y. Manoli, W. Mokwa, and M. Rospert, "A CMOS-compatible monolithic conductivity sensor with integrated electrode," Sens. Actuators B, Chem., vol. 43, pp. 31-37, 1994.
3. A. Volanschi, W. Olthuis, and P. Bergveld, "Design of a miniature electrolyte conductivity probe using ISFET's in a four point configuration," Sens. Actuators B, Chem., vol. 18-19, pp. 404-407, 1994.
4. W. Olthuis, W. Streekstra, and P. Bergveld, "Theoretical and experimental determination of cell constants of planar-interdigitataed electrolyte conductivity sensors," Sens. Actuators B, vol. 24-25, pp. 252-256, 1995.
5. N. F. Sheppard, Jr. and D. J. Mears, "Model of an immobilized enzyme conductimetric urea biosensor," Biosens. Bioelectron., vol. 11, pp. 967-979, 1996.
6. J. O. Bockris and A.K.N. Reddy, Modern Electrochemistry. New York: Plenum, 1970.
7. A. Nussbaum, Electromagnetic Theory for Engineers and Scientists. Upper Saddle River, NJ: Prentice-Hall, 1965.
8. D. He, "Theory, fabrication and characterization of micromachined electrolytic solution conductivity sensors," Ph.D. dissertation, Dept. Mech. Ind. Eng., Univ. Illinois, Urbana-Champaign, 2001.
9. D. He and M. Shannon, "Integrated thin film liquid conductivity sensors," U.S. Patent 6 573 734B2, 2003.
10. R. A. Robinson and R. H. Stokes, Electrolyte Solutions. London, U.K.: Butterworth, 1955.