DC to radio-frequency characterization of ZrO2 dielectric for "metal-insulator-metal" integrated capacitors

APMC 2009 - Asia Pacific Microwave Conference 2009

Volumn , Issue , 2009, Pages 1397-1400

  Bertaud, T ^a,b   Vallee C ^b   Bermond, C ^a   Lacrevaz, T ^a   Flechet B ^a   Farcy, A ^c   Blonkovski, S ^c  

^a UNIVERSITÉ DE SAVOIE   (France)

^b Laboratoire Interdisciplinaire de Physique   (France)

^c STMICROELECTRONICS   (Italy)

Author keywords

C(V) characterization; MIM capacitors; RF technology; VCC; ZrO2

Indexed keywords

DIELECTRIC LAYER; ELECTRICAL PERFORMANCE; FREQUENCY EFFECT; INTEGRATED CAPACITORS; METAL INSULATOR METALS; METAL-INSULATOR-METAL CAPACITORS; MICROSTRIPES; MIM CAPACITORS; RADIO FREQUENCIES; RF TECHNOLOGY; VOLTAGE LINEARITY; VOLTAGE-CAPACITANCE; WIDE BAND FREQUENCIES;

CAPACITANCE; CAPACITORS; CHARACTERIZATION; DIELECTRIC MATERIALS; METAL INSULATOR BOUNDARIES; METALS; MICROWAVES; SEMICONDUCTOR INSULATOR BOUNDARIES; ZIRCONIUM ALLOYS;

MIM DEVICES;

EID: 77950684930     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/APMC.2009.5384500     Document Type: Conference Paper

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