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Sensors and Materials

Volumn 22, Issue 2, 2010, Pages 61-70

Atomic oxygen sensing using a quartz crystal microbalance with a polymer thin film prepared by RF sputtering

(4) Matsumoto, Hiroyuki a Matsuoka, Mikihiko a Iwamori, Satoru b Noda, Kazutoshi c

a Iwasaki Electric Co Ltd (Japan)

b KANAZAWA UNIVERSITY (Japan)

c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

Author keywords

Atomic oxygen; Polyimide; Quartz crystal microbalance; RF sputtering

Indexed keywords

EID: 77950634924 PISSN: 09144935 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (4)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.