Improved fabrication yield for 10-V programmable josephson voltage standard circuit including 524288 NbN/TiN/NbN josephson junctions

IEEE Transactions on Applied Superconductivity

Volumn 20, Issue 2, 2010, Pages 71-75

  Yamamori, Hirotake ^a   Yamada, Takahiro ^a   Sasaki, Hitoshi ^a   Shoji, Akira ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Cryocooler; Double barrier; NbN; Programmable Josephson voltage standard (PJVS); TiN

Indexed keywords

CIRCUIT DESIGNS; CRYOCOOLERS; DOUBLE BARRIERS; FABRICATION YIELD; HIGH OUTPUT VOLTAGE; JOSEPHSON JUNCTIONS; NBN; OUTPUT VOLTAGES; PROGRAMMABLE JOSEPHSON VOLTAGE STANDARD; PROGRAMMABLE JOSEPHSON VOLTAGE STANDARD CIRCUITS; SHAPIRO STEPS; VACUUM CHAMBERS;

COOLING; CRYOGENIC EQUIPMENT; CRYOGENICS; DEFECTS; FABRICATION; FILM PREPARATION; INTEGRATED CIRCUIT MANUFACTURE; MICROWAVE IRRADIATION; STANDARDS; TITANIUM NITRIDE; VOLTAGE MEASUREMENT;

JOSEPHSON JUNCTION DEVICES;

EID: 77950596321     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2010.2041349     Document Type: Article

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