SOI-Supported microdevice for hydrogen purification using palladiumsilver membranes

Journal of Microelectromechanical Systems

Volumn 19, Issue 2, 2010, Pages 402-409

  Deshpande, Kishori ^a   Meldon, Jerry H ^b   Schmidt, Martin A ^c   Jensen, Klavs F ^c  

^a DOW CHEMICAL COMPANY   (United States)

^b Tufts University   (United States)

^c Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

Hydrogen; Micromachining; Palladium alloys; Silicon on insulator (SOI) technology

Indexed keywords

BULK- MICROMACHINING; CO-GENERATION; COMPACT DESIGNS; CONVENIENT ALTERNATIVES; ENERGY SOURCE; FUEL CELL CATALYSTS; FUEL REFORMING; HIGH-PURITY; HYDROGEN FLUXES; HYDROGEN PERMEATION; HYDROGEN PURIFICATION; MICRO DEVICES; MICROMEMBRANES; ON-DEMAND HYDROGEN; PALLADIUM MEMBRANE; PALLADIUM-SILVER MEMBRANE; PERMEATION RATE; PORTABLE APPLICATIONS; PORTABLE POWER APPLICATIONS; SILICON ON INSULATOR WAFERS; SILICON-ON-INSULATOR (SOI) TECHNOLOGY; STRUCTURAL STABILITIES; SUBMICROMETERS; TRANSPORT RESISTANCE;

COMPOSITE MICROMECHANICS; FUEL CELLS; FUEL STORAGE; HYDROGEN PRODUCTION; HYDROGEN STORAGE; MEMBRANES; MICROMACHINING; MICROSENSORS; PALLADIUM; PALLADIUM ALLOYS; PORTABLE EQUIPMENT; PURIFICATION; SEMICONDUCTING SILICON COMPOUNDS; SILICON ALLOYS; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; STABILITY; WET ETCHING;

PERMEATION;

EID: 77950582996     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2041529     Document Type: Article

References (26)

1. F. Dimeo, I. S. Chen, P. Chen, J. Neuner, A. Roerhl, and J. Welch, "MEMS-based hydrogen gas sensors," Sens. Actuators B, Chem. 117, no.1, pp. 10-16, Sep. 2006.
2. National Research Council, Meeting the Energy Needs of Future Warriors. Washington, DC: Nat. Academies Press, 2004.
3. C. K. Dyer, "Replacing the battery in portable electronics," Sci. Amer. 281, pp. 88-93, Jul. 1999.
4. L. Schlapbach and A. Zuttel, "Hydrogen-storage materials for mobile applications," Nature 414, no.6861, pp. 353-358, Nov. 2001.
5. L. R. Arana, S. B. Schaevitz, A. J. Franz, M. A. Schmidt, and K. F. Jensen, "A microfabricated suspended-tube chemical reactor for thermally efficient fuel processing," J. Microelectromech. Syst. 12, no.5, pp. 600-612, Oct. 2003.
6. J. D. Holladay, E. O. Jones, R. A. Dagle, G. G. Xia, C. Cao, and Y. Wang, "High efficiency and low carbon monoxide micro-scale methanol processors," J. Power Sources 131, no. 1/2, pp. 69-72, May 2004.
7. Z. G. Qi, C. Z. He, and A. Kaufman, "Effect of CO in the anode fuel on the performance of PEM fuel cell cathode," J. Power Sources 111, no.2, pp. 239-247, Sep. 2002.
8. B. A. Wilhite, M. A. Schmidt, and K. F. Jensen, "Palladium-based mi-cromembranes for hydrogen separation: Device performance and chemical stability," Ind. Eng. Chem. Res. 43, no.22, pp. 7083-7091, Oct. 2004.
9. A. Franz, K. F. Jensen, and M. A. Schmidt, "Palladium based micromem-branes for hydrogen separation and hydrogenation/dehydrogenation reactions," in Proc. 12th Int. Conf. Microelectromech. Syst., Orlando, FL, 1999, pp. 382-385.
10. J. T. F. Keurentjes, F. C. Gielens, H. D. Tong, C. J. M. van Rijn, and M. A. G. Vorstman, "High-flux palladium membranes based on microsystem technology," Ind. Eng. Chem. Res. 43, no.16, pp. 4768-4772, Aug. 2004.
11. Y. Zhang, J. Gwak, Y. Murakoshi, T. Ikehara, R. Maeda, and C. Nishimura, "Hydrogen permeation characteristics of thin Pd membrane prepared by microfabrication technology," J. Membr. Sci. 277, no. 1/2, pp. 203-209, Jun. 2006.
12. H. D. Tong, J. W. E. Berenschot, M. J. D. Boer, J. G. E. Gardeniers, H. Wensink, H. V. Jansen, W. Nijdam, M. C. Elwenspock, E. C. Gielens, and C. J. M. v. Rijn, "Microfabrication of palladium-silver alloy membranes for hydrogen separation," J. Microelectromech. Syst. 12, no.5, pp. 622-629, Oct. 2003.
13. K. Aoki, S. Yokoyama, K. Kusakabe, and S. Morooka, "Preparation of supported palladium membrane and separation of hydrogen," Korean J. Chem. Eng. 13, no.5, pp. 530-537, Sep. 1996.
14. K. S. Rothenberger, A. V. Cugini, B. H. Howard, R. P. Killmeyer, M. V. Ciocco, B. D. Morreale, R. M. Enick, F. Bustamante, I. P. Mardilovich, and Y. H. Ma, "High pressure hydrogen permeance of porous stainless steel coated with a thin palladium film via electroless plating," J. Membr. Sci. 244, no. 1/2, pp. 55-68, Nov. 2004.
15. 2 permeation studies," AIChE J. 48, no.2, pp. 262-268, Feb. 2002.
16. D. A. P. Tanaka, M. A. L. Tanco, S. Niwa, Y. Wakui, F. Mizukami, T. Namba, and T. M. Suzuki, "Preparation of palladium and silver alloy membrane on a porous α-alumina tube via simultaneous electroless plating," J. Membr. Sci. 247, no. 1/2, pp. 21-27, Feb. 2005.
17. S. Tosti, L. Bettinali, and V. Violante, "Rolled thin Pd and Pd-Ag membranes for hydrogen separation and production," Int. J. Hydrogen Energy 25, no.4, pp. 319-325, Apr. 2000.
18. W. C. Young and R. G. Budynas, Roark's Formulas for Stress and Strain, 7th ed. New York: McGraw-Hill, 2002, p. 488.
19. F. E. H. Tay, C. Iliescu, J. Jing, and J. Miao, "Defect-free wet etching through pyrex glass using Cr/Au mask," Microsyst. Technol. 12, no. 10/11, pp. 935-939, Sep. 2006. (Pubitemid 41509173)
20. D. C. S. Bien, P. V. Rainey, S. J. N. Mitchell, and H. S. Gamble, "Characterization of masking materials for deep glass micromachining," J. Micromech. Microeng. 13, no.4, pp. S34-S40, Jun. 2003.
21. S. V. Karnik, M. K. Hatalis, and M. V. Kothare, "Towards a palladium micro-membrane for the water gas shift reaction: Microfabrication approach and hydrogen purification results," J. Microelectromech. Syst. 12, no.1, pp. 93-100, Feb. 2003.
22. S.-Y. Ye, S. Tanaka, M. Esashi, S. Hamakawa, T. Hanaoka, and F. Mizukami, "Thin palladium membrane microreactors with oxidized porous silicon support and their application," J. Micromech. Microeng. 15, no.11, pp. 2011-2018, Nov. 2005.
23. T. L. Ward and T. Dao, "Model of hydrogen permeation behavior in palladium membranes," J. Membr. Sci. 153, no.2, pp. 211-231, Feb. 1999.
24. E. Kikuchi and S. Uemiya, "Preparation of supported thin palladium-silver alloy membranes and their characteristics for hydrogen separation," Gas Separ. Purif. 5, pp. 261-266, 1991.
25. R. B. Bird, W. E. Stewart, and E. N. Lightfoot, Transport Phenomena, 2nd ed. New York: Wiley, 2002.
26. R. Ramachandran and R. K. Menon, "An overview of industrial uses of hydrogen," Int. J. Hydrogen Energy 23, no.7, pp. 593-598, Jul. 1998.