Thin palladium membrane microreactors with oxidized porous silicon support and their application

Journal of Micromechanics and Microengineering

Volumn 15, Issue 11, 2005, Pages 2011-2018

  Ye, Shu Ying ^a   Tanaka, Shuji ^b   Esashi, Masayoshi ^b   Hamakawa, Satoshi ^a   Hanaoka, Takaaki ^a   Mizukami, Fujio ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; MICROELECTROMECHANICAL DEVICES; NITROGEN; PALLADIUM; POROUS MATERIALS;

1-BUTENE; HYDROGEN PURIFICATION; THERMAL ISOLATION;

SILICA;

EID: 27144544999     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/11/004     Document Type: Article

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