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Volumn 21, Issue 16, 2010, Pages
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Hydrogen gas sensing properties of PdO thin films with nano-sized cracks
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Author keywords
[No Author keywords available]
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Indexed keywords
DIRECT CURRENT MAGNETRON SPUTTERING;
HIGHLY SENSITIVE;
HYDROGEN GAS;
HYDROGEN GAS SENSING;
HYDROGEN GAS SENSORS;
HYDROGEN SENSING PROPERTIES;
HYDROGEN SENSOR;
NANO-SIZED;
NOVEL METHODS;
PALLADIUM OXIDES;
PD FILM;
REDUCTION PROCESS;
RESPONSE BEHAVIOR;
RESPONSE TIME;
SCANNING ELECTRON MICROSCOPES;
SEM IMAGE;
SENSING PROPERTY;
SI SUBSTRATES;
SURFACE-TO-VOLUME RATIO;
THERMALLY OXIDIZED;
CHEMICAL SENSORS;
CRACKS;
GAS DETECTORS;
GAS SENSING ELECTRODES;
GASES;
HYDROGEN;
NANOSENSORS;
PALLADIUM;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
SURFACE MORPHOLOGY;
THIN FILMS;
OXIDE FILMS;
HYDROGEN;
NANOMATERIAL;
PALLADIUM;
PALLADIUM OXIDE;
ARTICLE;
ARTIFICIAL MEMBRANE;
CHEMISTRY;
CONDUCTOMETRY;
EQUIPMENT;
EQUIPMENT DESIGN;
EVALUATION;
GAS;
INSTRUMENTATION;
NANOTECHNOLOGY;
CONDUCTOMETRY;
EQUIPMENT DESIGN;
EQUIPMENT FAILURE ANALYSIS;
GASES;
HYDROGEN;
MEMBRANES, ARTIFICIAL;
NANOSTRUCTURES;
NANOTECHNOLOGY;
PALLADIUM;
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EID: 77950470754
PISSN: 09574484
EISSN: 13616528
Source Type: Journal
DOI: 10.1088/0957-4484/21/16/165503 Document Type: Article |
Times cited : (55)
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References (24)
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